IP Library › Granted Patent US 1,121,578
Granted Patent S1
US 1,121,578 · App. 29/919,824 · Granted Apr 7, 2026

Shield for plasma chambers

Inventors: Yogesh Mahesh Sovani (Bangalore, IN); Ravikumar Patil (Bangalore, IN); Jesu Titus Irudayaraj (Tamilnadu, IN); John Michael Kerns (Livermore, CA)
Assignee: LAM RESEARCH CORPORATION
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 1,121,578
App. No.
29/919,824
Granted
Apr 7, 2026
Kind
S1
Claims (1)

The ornamental design for a shield for plasma chambers, as shown and described.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 28, 2026
From: LAM RESEARCH (INDIA) PRIVATE LIMITED
To: LAM RESEARCH CORPORATION
Reel/Frame 073616/0063 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2024
From: SOVANI, YOGESH MAHESH; PATIL, RAVIKUMAR; IRUDAYARAJ, JESU TITUS
To: LAM RESEARCH (INDIA) PRIVATE LIMITED
Reel/Frame 066052/0589 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2024
From: KERNS, JOHN MICHAEL
To: LAM RESEARCH CORPORATION
Reel/Frame 066052/0472 →
References Cited (39)
US 5914050A · Comita · 1999 [cited by examiner]
US D491963S · Doba · 2004 [cited by examiner]
US D523043S · Conway · 2006 [cited by examiner]
US D525273S · Conway · 2006 [cited by examiner]
US D588078S · Okada · 2009 [cited by examiner]
US 8156392B2 · Flynn et al. · 2012 [cited by applicant]
US 8156892B2 · Hardikar et al. · 2012 [cited by applicant]
US D665071S · Goel · 2012 [cited by examiner]
US 8733281B2 · Hirayama et al. · 2014 [cited by applicant]
US D716239S · Lau · 2014 [cited by examiner]
US D875054S · Shono · 2020 [cited by examiner]
US D875055S · Shono · 2020 [cited by examiner]
US D888903S · Gunther · 2020 [cited by examiner]
US D891382S · Koppa · 2020 [cited by examiner]
US D895777S · Chase · 2020 [cited by examiner]
US D973609S · Babu · 2022 [cited by examiner]
US D979524S · Perry · 2023 [cited by examiner]
US 11658016B2 · Scheible et al. · 2023 [cited by applicant]
US D1038049S · Chowdhury et al. · 2024 [cited by applicant]
US D1042373S · Nallagonda · 2024 [cited by examiner]
US D1051867S · Perry · 2024 [cited by examiner]
US D1066275S · Rane · 2025 [cited by examiner]
US D1066440S · Li · 2025 [cited by examiner]
US 20040077167A1 · Willis · 2004 [cited by examiner]
US 20050277375A1 · Young · 2005 [cited by examiner]
US 20060283551A1 · Son · 2006 [cited by examiner]
US 20090050272A1 · Rosenberg et al. · 2009 [cited by applicant]
US 20090283037A1 · Hardikar et al. · 2009 [cited by applicant]
US 20150329955A1 · Sun · 2015 [cited by examiner]
US 20160002788A1 · Nal · 2016 [cited by examiner]
US 20180291501A1 · Montes et al. · 2018 [cited by applicant]
JP 2024011177 · 2024 [cited by examiner]
KR 101486553B1 · 2015 [cited by applicant]
KR 3020240021332 · 2025 [cited by examiner]
TW d218919S · 2022 [cited by applicant]
DPS Upper Chamber Coatings,chrome-extension://efaidnbmnnnibpcajpcglclefindmkaj/https://apsmaterials.com/wp-content/uploads/2019/11/DPS_Brochure.pdf, 2025. (Year: 2025). [cited by examiner]
Gatzen, Caren; Mack, Daniel Emil; Guillon, Oliver; and Vaβen, Robert. “Improved Adhesion of Different Environmental Barrier Coatings on Ai2O3/Al2O3-Cermaic Matrix Composites”; Advanced Engineering Materials; Institute o… [cited by applicant]
Taiwanese Office Action for Taiwanese Application No. 113302710 dated Jan. 21, 2025. [cited by applicant]
International Search Report and Written Opinion for PCT/US2024/058176 mailed Mar. 18, 2025. [cited by applicant]