Architecture design of monolithically integrated 3D CMOS logic and memory
A semiconductor device is provided. The device includes a plurality of transistor pairs that are stacked over a substrate. Each of the plurality of transistor pairs includes a n-type transistor and a p-type transistor that are stacked over one another. The device also includes a plurality of gate electrodes that are stacked over the substrate with a staircase configuration. The plurality of gate electrodes are electrically coupled to gate structures of the plurality of transistor pairs. The device further includes a plurality of source/drain (S/D) local interconnects that are stacked over the substrate with a staircase configuration. The plurality of S/D local interconnects are electrically coupled to source regions and drain regions of the plurality of transistor pairs.
1. A semiconductor device, comprising:
a plurality of transistor pairs that are stacked over a substrate, each of the plurality of transistor pairs including a n-type transistor and a p-type transistor that are stacked over one another;
a plurality of gate electrodes that are stacked over the substrate with a staircase configuration, the plurality of gate electrodes being electrically coupled to gate structures of the plurality of transistor pairs;
a plurality of source/drain (S/D) local interconnects that are stacked over the substrate and extend in a first direction parallel to the substrate with a staircase configuration, the plurality of S/D local interconnects being electrically coupled to source regions and drain regions of the plurality of transistor pairs; and
an array of vertical contacts that extend from the plurality of gate electrodes and the plurality of S/D local interconnects in a second direction perpendicular to the substrate.
2. The device of claim 1 , wherein the n-type transistor is positioned over the p-type transistor so as to form a complementary field effect transistor (CFET) device.
3. The device of claim 1 , wherein the p-type transistor is positioned over the n-type transistor so as to form a complementary field effect transistor device.
4. The device of claim 1 , wherein:
the array of vertical contacts are electrically coupled to the plurality of gate electrodes, and the plurality of S/D local interconnects.
5. The device of claim 4 , further comprising:
a series of wiring levels that are positioned over the array of vertical contacts and provide a functionality of the semiconductor device by connecting the array of vertical contacts.
6. The device of claim 1 , wherein the n-type transistor and the p-type transistor share a gate structure that is electrically coupled to one of the plurality of gate electrodes.
7. The device of claim 6 , wherein the n-type transistor has a source region and a drain region that are positioned at two ends of a n-type channel region that is surrounded by the gate structure, the n-type channel region, the source region and the drain region of the n-type transistor being arranged in the first direction.
8. The device of claim 6 , wherein the p-type transistor has a source region and a drain region that are positioned at two ends of a p-type channel region that is surrounded by the gate structure, the p-type channel region, the source region and the drain region of the p-type transistor being arranged in the first direction.
9. The device of claim 1 , wherein each of the plurality of S/D local interconnects is positioned at two sides of a respective gate electrode of the plurality of gate electrodes.
10. A semiconductor device, comprising:
a plurality of transistor pairs that are stacked over a substrate, wherein the plurality of transistor pairs have a plurality of gate electrodes that are stacked over the substrate with a staircase configuration and electrically coupled to gate structures of the plurality of transistor pairs, and a plurality of source/drain (S/D) local interconnects that are stacked over the substrate with a staircase configuration and electrically coupled to source regions and drain regions of the plurality of transistor pairs;
an array of vertical contacts that are positioned over the plurality of transistor pairs, arranged in a direction perpendicular to the substrate and electrically coupled to the plurality of gate electrodes, and the plurality of S/D local interconnects; and
a series of wiring levels that are positioned over the array of vertical contacts and provide a functionality of the semiconductor device by connecting the array of vertical contacts.
11. The device of claim 10 , wherein each of the plurality of transistor pairs comprises a n-type transistor and a p-type transistor that are stacked over one another, the n-type transistor and the p-type transistor sharing a gate structure.
12. The device of claim 11 , wherein the n-type transistor is positioned over the p-type transistor so as to form a complementary field effect transistor device.
13. The device of claim 11 , wherein the p-type transistor is positioned over the n-type transistor so as to form a complementary field effect transistor device.