Method for preparing super-lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film
A method for preparing a super-lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film is provided. A substrate is ultrasonically cleaned in absolute ethyl alcohol and acetone sequentially for 15 min. The substrate is cleaned by argon plasma bombardment for 15 min. A fullerene-like carbon layer A having an onion-like structure is prepared by high-vacuum medium-frequency magnetron sputtering for 30 s. A graphene-like boron nitride layer B is prepared by high-vacuum medium-frequency magnetron sputtering and coating device to sputter the elemental boron target for 30 s. Steps (3) and (4) are repeated 80 times to overlay the fullerene-like carbon layer A and the graphene-like boron nitride layer B in an alternate way. The super-lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film has a large load capacity, and excellent wear resistance, high temperature resistance and super lubrication.
1. A method for preparing a lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film, comprising:
1) ultrasonically cleaning a substrate sequentially in absolute ethyl alcohol acetone;
2) cleaning the substrate by argon plasma bombardment for 15 min;
3) preparing a fullerene-like carbon layer A having an onion-like structure by high-vacuum medium-frequency magnetron sputtering;
4) preparing a graphene-like boron nitride layer B using a high-vacuum medium-frequency magnetron sputtering and coating device to sputter an elemental boron target;
5) repeating steps (3) and (4) 60-80 times to overlay the fullerene-like carbon layer A and the graphene-like boron nitride layer B in an alternate way to obtain the lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film with a first layer and a last layer being the fullerene-like carbon layer A.
2. The method of claim 1 , wherein the substrate is made of metal or ceramic.
3. The method of claim 1 , wherein the fullerene-like carbon layer A has a thickness of 6-12 nm, the graphene-like boron nitride layer B has a thickness of 2.1-3.5 nm, and the multilayer fullerene-like carbon layer/graphene-like boron nitride lubricative composite thin film has a total thickness of 2-3.5 μm.
4. The method of claim 1 , wherein the fullerene-like carbon layer A is prepared by high-vacuum medium-frequency magnetron sputtering using methane or acetylene under a pressure of 10-15 Pa, a negative bias pulsed voltage of 800-1000 V and a duty ratio of 60%-80% for 10-50 s.
5. The method of claim 1 , wherein the graphene-like boron nitride layer B is prepared using the high-vacuum medium-frequency magnetron sputtering and coating device to sputter the elemental boron target in an atmosphere of nitrogen and argon under a pressure of 0.4-0.5 Pa, a negative bias pulsed voltage of 400-1000 V and a duty ratio of 60%-80% for 10-50 s; wherein the nitrogen has a purity of more than 99.99% and a flow rate of 55-95 sccm; and the argon has a purity of more than 99.99% and a flow rate of 60-120 sccm.
6. The method of claim 1 , wherein the elemental boron target is rectangular, circular or a rotary column.
7. The preparation method of claim 1 , wherein a purity of the elemental boron target is more than 99.9% and is produced by hot forming; and the elemental boron target has a length of 60-90 cm, a width of 10-20 cm and a height of 1-5 cm.