Radiation detecting device, radiation detecting system, and method for manufacturing the radiation detecting device
A radiation detecting device in which defective adhesion between an adhesive member and end portions of a plurality of sensor substrates is reduced. A radiation detecting device includes a plurality of sensor substrates disposed adjacent to each other, each sensor substrate including a side surface that connects a first surface, where a plurality of photoelectric converting elements are arranged in an array, and an opposing second surface to each other; a scintillator disposed at a side of the first surfaces of the plurality of sensor substrates; and a sheet-like adhesive member for adhering the plurality of sensor substrates and the scintillator to each other, wherein, between the plurality of sensor substrates, the sheet-like adhesive member adheres to the first surfaces and at least portions of the side surfaces such that the sheet-like adhesive member extends and continuously adheres from the first surfaces to the at least portions of the side surfaces.
1. A radiation detecting device comprising:
a plurality of sensor substrates disposed adjacent to each other, each sensor substrate including a first surface where a plurality of photoelectric converting elements are arranged in an array, a second surface that opposes the first surface, and a side surface that connects the first surface and the second surface to each other;
a scintillator disposed at a side of the first surfaces of the plurality of sensor substrates; and
a sheet-like adhesive member for adhering the plurality of sensor substrates and the scintillator to each other,
wherein each of the plurality of sensor substrates further includes a structure having a stepped surface that becomes higher from the side surface in order of the first surface, a guard ring, a passivation film, and a protective layer, the guard ring disposed on at least a portion of the first surface along peripheries of the plurality of photoelectric converting elements, the passivation film that covers a portion of the guard ring and the plurality of photoelectric converting elements, and the protective layer that covers the passivation film except an end portion of the passivation film,
wherein, between the plurality of sensor substrates, the sheet-like adhesive member extends and continuously adheres to the protective layer, the passivation film, the guard ring, the first surfaces and at least portions of the side surfaces such that the sheet-like adhesive member extends and continuously adheres from the structure to the at least portions of the side surfaces.
2. The radiation detecting device according to claim 1 , wherein, between the plurality of sensor substrates, at least one of the plurality of sensor substrates includes a third surface that is not parallel to the first surface and to the side surface and that is disposed between the first surface and the side surface, and wherein, between the plurality of sensor substrates, the sheet-like adhesive member extends and continuously adheres from the first surface to the third surface and the at least a portion of the side surface.
3. The radiation detecting device according to either claim 1 , wherein, between the plurality of sensor substrates, the side surface of at least one of the plurality of sensor substrates is inclined towards an inner side of the at least one of the sensor substrates from the first surface towards the second surface with respect to a perpendicular line that is perpendicular to the first surface.
4. The radiation detecting device according to any one of claim 1 , further comprising: a base that supports the plurality of sensor substrates; and a fixing member for fixing the plurality of sensor substrates to the base, wherein a rigidity of the fixing member is less than a rigidity of the adhesive member.
5. A radiation detecting system comprising:
the radiation detecting device according to claim 1 ; and
a display device that displays an image based on a signal acquired by the radiation detecting device.
6. A method for manufacturing a radiation detecting device, comprising:
a disposing step of disposing a scintillator at a side of first surfaces of a plurality of sensor substrates with a sheet-like adhesive member interposed therebetween, the plurality of sensor substrates being disposed adjacent to each other, each sensor substrate including the first surface where a plurality of photoelectric converting elements are arranged in an array, a second surface that opposes the first surface, and a side surface that connects the first surface and the second surface to each other; and
an adhering step of causing the sheet-like adhesive member to extend and continuously adhere from the first surfaces to at least portions of the side surfaces between the plurality of sensor substrates by pressing a region of the scintillator corresponding to a region between the plurality of sensor substrates from a side opposite to the plurality of sensor substrates
wherein each of the plurality of sensor substrates further includes a structure having a stepped surface that becomes higher from the side surface in order of the first surface, a guard ring, a passivation film, and a protective layer, the guard ring disposed on at least a portion of the first surface along peripheries of the plurality of photoelectric converting elements, the passivation film that covers a portion of the guard ring and the plurality of photoelectric converting elements, and the protective layer that covers the passivation film except an end portion of the passivation film, and
wherein the adhering step comprises causing the sheet-like adhesive member to extend and continuously adhere to the protective layers, the passivation films, the guard rings, the first surfaces, and the at least portions of the side surfaces between the plurality of sensor substrates such that the sheet-like adhesive member extends and continuously adheres from the structure to the at least portions of the side surfaces.
7. The method for manufacturing the radiation detecting device according to claim 6 ,
wherein, between the plurality of sensor substrates, at least one of the plurality of sensor substrates includes a third surface that is not parallel to the first surface and to the side surface and that is disposed between the first surface and the side surface, and
wherein the adhering step comprises causing the sheet-like adhesive member to extend and continuously adhere from the first surface to the third surface and the at least a portion of the side surface between the plurality of sensor substrates.
8. The method for manufacturing the radiation detecting device according to claim 6 , wherein, between the plurality of sensor substrates, the side surface of at least one of the plurality of sensor substrates is inclined towards an inner side of the at least one of the sensor substrates from the first surface towards the second surface with respect to a perpendicular line that is perpendicular to the first surface.
9. The method for manufacturing the radiation detecting device according to claim 6 , further comprising:
a fixing step of fixing the plurality of sensor substrates to a base by using a fixing member,
wherein a rigidity of the fixing member is less than a rigidity of the sheet-like adhesive member.
10. The method for manufacturing the radiation detecting device according to claim 6 , wherein the adhering step comprises pressing a region corresponding to a region between the plurality of sensor substrates from the side opposite to the plurality of sensor substrates by using a roller.