IP Library › Granted Patent US 11,227,193
Granted Patent B2
US 11,227,193 · App. 17/216,449 · Granted Jan 18, 2022

Automated image measurement for process development and optimization

Inventors: Abhinav Kumar (San Jose, CA); Benjamin Schwarz (San Jose, CA); Charles Hardy (San Jose, CA)
Assignee: APPLIED MATERIALS, INC.
G06K9/627G06K9/80G06N3/08G06N20/00G06T5/002G06T5/50G06T2207/20081G06T2207/20084G06T2207/20192
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Quick Facts
Patent No.
US 11,227,193
App. No.
17/216,449
Granted
Jan 18, 2022
Kind
B2
Abstract

A method includes providing attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, predictive data. The method further includes determining, based on the predictive data, image measurements of the image of the product associated with the manufacturing process. Manufacturing parameters of the manufacturing process are to be updated based on the image measurements.

Claims (40)

1. A method comprising:

providing attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model;

obtaining, from the trained machine learning model, predictive data; and

determining, based on the predictive data, image measurements of the image of the product associated with the manufacturing process, wherein manufacturing parameters of the manufacturing process are to be updated based on the image measurements.

2. The method of claim 1 further comprising:

determining that the image is associated with the manufacturing parameters of the manufacturing process;

determining historical image measurements of historical images associated with historical manufacturing parameters are closer to target dimensions than the image measurements; and

determining updates to the manufacturing parameters based on the historical manufacturing parameters.

3. The method of claim 2 further comprising causing the updates to the manufacturing parameters to be displayed via a graphical user interface.

4. The method of claim 2 further comprising causing the updates to the manufacturing parameters to be implemented by manufacturing equipment.

5. The method of claim 2 further comprising causing operation of manufacturing equipment to be interrupted to implement the updates to the manufacturing parameters.

6. The method of claim 1 , wherein the manufacturing parameters comprise a process parameter.

7. The method of claim 1 , wherein the manufacturing parameters comprise a hardware parameter.

8. A system comprising:

a memory; and

a processing device, coupled to the memory, to:

provide attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model;

obtain, from the trained machine learning model, predictive data; and

determine, based on the predictive data, image measurements of the image of the product associated with the manufacturing process, wherein manufacturing parameters of the manufacturing process are to be updated based on the image measurements.

9. The system of claim 8 , wherein the processing device is further to:

determine that the image is associated with the manufacturing parameters of the manufacturing process;

determine historical image measurements of historical images associated with historical manufacturing parameters are closer to target dimensions than the image measurements; and

determine updates to the manufacturing parameters based on the historical manufacturing parameters.

10. The system of claim 9 , wherein the processing device is further to cause the updates to the manufacturing parameters to be displayed via a graphical user interface.

11. The system of claim 9 , wherein the processing device is further to cause the updates to the manufacturing parameters to be implemented by manufacturing equipment.

12. The system of claim 9 , wherein the processing device is further to cause operation of manufacturing equipment to be interrupted to implement the updates to the manufacturing parameters.

13. The system of claim 8 , wherein the manufacturing parameters comprise a process parameter.

14. The system of claim 8 , wherein the manufacturing parameters comprise a hardware parameter.

15. A non-transitory computer readable medium having instructions stored thereon, which, when executed by a processing device, cause the processing device to perform operations comprising:

providing attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model;

obtaining, from the trained machine learning model, predictive data; and

determining, based on the predictive data, image measurements of the image of the product associated with the manufacturing process, wherein manufacturing parameters of the manufacturing process are to be updated based on the image measurements.

16. The non-transitory computer readable medium of claim 15 , wherein the operations further comprise:

determining that the image is associated with the manufacturing parameters of the manufacturing process;

determining historical image measurements of historical images associated with historical manufacturing parameters are closer to target dimensions than the image measurements; and

determining updates to the manufacturing parameters based on the historical manufacturing parameters.

17. The non-transitory computer readable medium of claim 16 , wherein the operations further comprise causing the updates to the manufacturing parameters to be displayed via a graphical user interface.

18. The non-transitory computer readable medium of claim 16 , wherein the operations further comprise causing the updates to the manufacturing parameters to be implemented by manufacturing equipment.

19. The non-transitory computer readable medium of claim 16 , wherein the operations further comprise causing operation of manufacturing equipment to be interrupted to implement the updates to the manufacturing parameters.

20. The non-transitory computer readable medium of claim 15 , wherein the manufacturing parameters comprise one or more of a process parameter or a hardware parameter.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2021
From: KUMAR, ABHINAV; SCHWARZ, BENJAMIN; HARDY, CHARLES
To: APPLIED MATERIALS, INC.
Reel/Frame 055758/0758 →
Continuity (2)
Continuation 16259891 · Jan 28, 2019
Related Publication 20210216809A1 · Jul 15, 2021