IP Library Granted Patent US 11,227,770
Granted Patent B2
US 11,227,770 · App. 16/287,237 · Granted Jan 18, 2022

Passivation of nonlinear optical crystals

Inventors: Yung-Ho Alex Chuang (Cupertino, CA); Vladimir Dribinski (Scotts Valley, CA)
Assignee: KLA Corporation
H01L21/3003C30B29/10C30B33/00C30B33/02G01N21/3563G01N21/59G01N21/8806G01N21/9501G02F1/3501H01L21/322H01S3/027H01S3/094H01S3/109H01S3/1666G01N2021/3568G01N2021/3595G01N2021/8477G01N2021/8822G01N2201/06113
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Quick Facts
Patent No.
US 11,227,770
App. No.
16/287,237
Granted
Jan 18, 2022
Kind
B2
Abstract

A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.

Claims (36)

1. A method comprising:

providing a nonlinear optical (NLO) crystal comprising cesium lithium borate;

performing an annealing process on the NLO crystal by maintaining a temperature of the NLO crystal temperature between 300° C. and 350° C.; and

following the annealing process, passivating the NLO crystal with a passivating gas having a concentration of at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound at or near a selected concentration to achieve a selected passivation level within the NLO crystal to compensate for broken bonds within the NLO crystal caused by the annealing of the NLO crystal.

2. The method of claim 1 , wherein the passivating gas comprises:

a mixture of hydrogen, deuterium and an inert gas.

3. The method of claim 1 , wherein the passivating gas comprises:

at least one inert gas mixed with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound.

4. The method of claim 1 , wherein the performing an annealing process on the NLO crystal comprises:

maintaining a temperature of the NLO crystal between room temperature and a melting point of the NLO crystal.

5. The method of claim 1 , further comprising:

containing the NLO crystal within a crystal housing unit.

6. The method of claim 1 , further comprising:

transmitting a beam of light from a light source through the NLO crystal.

7. The method of claim 6 , further comprising:

transmitting the beam of light from the light source through the NLO crystal to generate deep ultraviolet light with the NLO crystal.

8. The method of claim 6 , further comprising:

shaping the beam of light from the light source with one or more beam shaping optics.

9. A method comprising:

providing an NLO crystal;

performing an annealing process on the NLO crystal by maintaining a temperature of the NLO crystal temperature between 300° C. and 350° C.; and

following the annealing process, passivating the NLO crystal with a passivating gas having a concentration of at least one of hydrogen, deuterium, a hydrogen-containing compound and a deuterium-containing compound at or near a selected concentration to achieve a selected passivation level within the NLO crystal to compensate for broken bonds within the NLO crystal caused by the annealing of the NLO crystal.

10. The method of claim 9 , wherein the passivating gas comprises:

a mixture of hydrogen, deuterium and an inert gas.

11. The method of claim 9 , wherein the passivating gas comprises:

at least one inert gas mixed with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound.

12. The method of claim 9 , wherein the performing an annealing process on the NLO crystal comprises:

performing an annealing process on the NLO crystal between room temperature and a melting point of the NLO crystal.

13. The method of claim 9 , further comprising:

containing the NLO crystal within a crystal housing unit.

14. The method of claim 9 , further comprising:

transmitting a beam of light from a light source through the NLO crystal.

15. The method of claim 14 , further comprising:

transmitting the beam of light from the light source through the NLO crystal to generate deep ultraviolet light with the NLO crystal.

16. The method of claim 14 , further comprising:

shaping the beam of light from the light source with one or more beam shaping optics.

Assignments (2)
CHANGE OF NAME Recorded Dec 2, 2021
From: KLA-TENCOR CORPORATION
To: KLA CORPORATION
Reel/Frame 058294/0850 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2019
From: CHUANG, YUNG-HO; DRIBINSKI, VLADIMIR
To: KLA-TENCOR CORPORATION
Reel/Frame 048455/0504 →
Continuity (5)
Continuation 15284231 · Oct 3, 2016
Continuation 15010331 · Jan 29, 2016
Continuation 13488635 · Jun 5, 2012
Provisional Application 61544425 · Oct 7, 2011
Related Publication 20190198330A1 · Jun 27, 2019