IP Library › Granted Patent US 11,227,953
Granted Patent B2
US 11,227,953 · App. 16/767,479 · Granted Jan 18, 2022

Tunneling field effect transistor

Inventors: Kimihiko Kato (Tokyo, JP); Shinichi Takagi (Tokyo, JP); Mitsuru Takenaka (Tokyo, JP); Hitoshi Tabata (Tokyo, JP); Hiroaki Matsui (Tokyo, JP)
Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
H01L29/78648H01L29/0895H01L29/122H01L29/165H01L29/66439H01L29/775
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Quick Facts
Patent No.
US 11,227,953
App. No.
16/767,479
Granted
Jan 18, 2022
Kind
B2
Abstract

A tunneling field effect transistor according to an embodiment of the present invention includes: a first semiconductor layer having a first conductive type; a second semiconductor layer having a second conductive type and realizing a heterojunction with respect to the first semiconductor layer in a first region; a gate insulating layer over the second semiconductor layer in the first region; a gate electrode layer over the gate insulating layer; a first electrode layer electrically connected to the first semiconductor layer; a second electrode layer electrically connected to the second semiconductor layer; and a first insulating layer interposed between the first semiconductor layer and the second semiconductor layer in a second region adjacent to the first region toward the second electrode layer.

Claims (60)

1. A tunneling field effect transistor comprising:

a first semiconductor layer having a first conductive type;

a second semiconductor layer having a second conductive type and realizing a heterojunction with respect to the first semiconductor layer in a first region;

a gate insulating layer over the second semiconductor layer in the first region;

a gate electrode layer over the gate insulating layer;

a first electrode layer electrically connected to the first semiconductor layer;

a second electrode layer electrically connected to the second semiconductor layer; and

a first insulating layer interposed between the first semiconductor layer and the second semiconductor layer in a second region adjacent to the first region toward the second electrode layer.

2. The tunneling field effect transistor according to claim 1 , wherein the first semiconductor layer and the second semiconductor layer are each a material having an energy band structure forming a type-II band structure by the heterojunction.

3. The tunneling field effect transistor according to claim 2 , wherein the second semiconductor layer is a material in which an energy of Conduction Band Minimum is present in a band gap of the first semiconductor layer.

4. The tunneling field effect transistor according to claim 3 , wherein a band gap of the second semiconductor layer is larger than that of the first semiconductor layer.

5. The tunneling field effect transistor according to claim 1 , wherein

the first semiconductor layer is a p-type semiconductor, and

the second semiconductor layer is an n-type semiconductor.

6. The tunneling field effect transistor according to claim 5 , wherein

the first semiconductor layer is a group IV semiconductor, and

the second semiconductor layer is a group II-VI semiconductor.

7. The tunneling field effect transistor according to claim 5 ,

wherein the first semiconductor layer is a group IV semiconductor, and

the second semiconductor layer includes a metal oxide.

8. The tunneling field effect transistor according to claim 7 ,

wherein the first semiconductor layer includes Si.

9. The tunneling field effect transistor according to claim 7 , wherein

the first semiconductor layer includes Si and Ge.

10. The tunneling field effect transistor according to claim 1 ,

wherein the first semiconductor layer is an n-type semiconductor, and

the second semiconductor layer is a p-type semiconductor.

11. The tunneling field effect transistor according to claim 1 ,

wherein the second semiconductor layer has permittivity smaller than permittivity of the first semiconductor layer.

12. The tunneling field effect transistor according to claim 1 , wherein

the gate insulating layer and the gate electrode layer are arranged so as to be expanded from the first region to the second region.

13. The tunneling field effect transistor according to claim 1 , wherein

the second region is adjacent to the first region also toward the first electrode layer.

14. The tunneling field effect transistor according to claim 1 , wherein

the second region surrounds the first region.

15. The tunneling field effect transistor according to claim 1 , wherein

a junction insulating layer including the first semiconductor layer as a component is arranged between the first semiconductor layer and the second semiconductor layer in a portion where the heterojunction is realized.

16. The tunneling field effect transistor according to claim 15 , wherein

the first semiconductor layer is a p-type semiconductor,

the second semiconductor layer is an n-type semiconductor, and

the junction insulating layer includes an oxide of the first semiconductor layer.

17. The tunneling field effect transistor according to claim 15 , wherein

the first semiconductor layer is an n-type semiconductor,

the second semiconductor layer is a p-type semiconductor, and

the junction insulating layer includes an oxide of the second semiconductor layer.

18. An electronic device comprising:

a plurality of the tunneling field effect transistors according to claim 1 , and

a conductor for supplying a signal to the tunneling field effect transistors.

19. The electronic device according to claim 18 , wherein

the plurality of the tunneling field effect transistors include at least an N-channel tunneling field effect transistor and a P-channel tunneling field effect transistor, and

the electronic device further includes a conductor which connects the N-channel tunneling field effect transistor and the P-channel tunneling field effect transistor.

20. A tunneling field effect transistor comprising:

a first semiconductor layer having a first conductive type;

a second semiconductor layer having a second conductive type and realizing a heterojunction with respect to the first semiconductor layer in a first region;

a gate insulating layer over the second semiconductor layer in the first region;

a gate electrode layer over the gate insulating layer;

a first electrode layer electrically connected to the first semiconductor layer; and

a second electrode layer electrically connected to the second semiconductor layer, wherein

the first region is a region where the first semiconductor layer and the second semiconductor layer form the heterojunction and

when viewed perpendicularly to a plane of the heterojunction, a second region where the first semiconductor layer and the second semiconductor layer overlap is wider than the first region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 27, 2020
From: KATO, KIMIHIKO; TAKAGI, SHINICHI; TAKENAKA, MITSURU; TABATA, HITOSHI; MATSUI, HIROAKI
To: JAPAN SCIENCE AND TECHNOLOGY AGENCY
Reel/Frame 052765/0110 →
Continuity (2)
Provisional Application 62591798 · Nov 29, 2017
Related Publication 20210005758A1 · Jan 7, 2021
Cited By (2)
US 12,593,467 US 12,615,804