Magnetic sensor
A magnetic sensor includes a plurality of magnetoresistive element units. Each of the magnetoresistive element units includes a flat-surface-type first magnetoresistive element having a detection axis in a first direction and a flat-surface-type second magnetoresistive element having a detection axis in a second direction different from the first direction. The first magnetoresistive element and the second magnetoresistive element are arranged so as to face each other. The plurality of magnetoresistive element units are arrayed in a direction orthogonal to flat surfaces of the first magnetoresistive element and the second magnetoresistive element. The surfaces facing a measurement sample constitute a surface parallel to the direction in which the magnetoresistive element units are arrayed.
1. A magnetic sensor, comprising:
a plurality of magnetoresistive element units, each of which including a flat-surface-type first magnetoresistive element having a detection axis in a first direction and a flat-surface-type second magnetoresistive element having a detection axis in a second direction different from the first direction, the second direction being orthogonal to the first direction,
wherein the first magnetoresistive element and the second magnetoresistive element of each of the magnetoresistive element units are arranged so as to face each other,
wherein the plurality of magnetoresistive element units are arrayed in a direction orthogonal to flat surfaces of the first magnetoresistive element and the second magnetoresistive element of each of the magnetoresistive element units, and
wherein other surfaces of the first magnetoresistive element and the second magnetoresistive element of each of the magnetoresistive element units facing a measurement sample constitute a surface parallel to the direction in which the magnetoresistive element units are arrayed.
2. The magnetic sensor according to claim 1 , wherein an insulating layer is provided between the first magnetoresistive element and the second magnetoresistive element.
3. The magnetic sensor according to claim 1 , wherein the magnetoresistive element units adjacent in the array direction are in contact with each other.
4. The magnetic sensor according to claim 1 , wherein a part of a substrate constituting the magnetoresistive element unit and a part of a substrate constituting the adjacent magnetoresistive element unit are arranged so as to overlap with each other in a direction orthogonal to the array direction.
5. The magnetic sensor according to claim 1 , wherein a first magnetic thin film having a detection axis in the first direction and a second magnetic thin film having a detection axis in the second direction are provided on both surfaces of each substrate, whereby the first magnetoresistive element and the second magnetoresistive element are formed, and
wherein the plurality of substrates are arrayed so that a surface adjacent to the first magnetic thin film and a surface adjacent to the second magnetic thin film face each other, whereby the plurality of magnetoresistive element units are formed.
6. The magnetic sensor according to claim 1 , further comprising a computing unit that derives a magnetic field intensity in the array direction on the basis of detection results given by the plurality of magnetoresistive element units.
7. The magnetic sensor according to claim 1 , further comprising:
an external magnetoresistive element that detects external magnetic field intensity; and
a specifying unit that specifies a noise component caused by an external environment on the basis of detection results given by the external magnetoresistive element.
8. The magnetic sensor according to claim 1 , further comprising a plurality of peripheral magnetoresistive elements distributed around the plurality of magnetoresistive element units.
9. The magnetic sensor according to claim 1 , wherein the measurement sample comprises a battery having flat surfaces.