Information processing device, program, process treatment executing device, and information processing system

1. An information processing device comprising:

a processor, and

a memory device storing a computer program that causes the processor to execute processes including

storing a plurality of model data elements each of which reproduces a change in state data of a workpiece, each of the model data elements being constructed, as an effect of a minimum unit of process treatment, from differential data between initial state data of a plurality of workpieces and end state data of the plurality of workpieces, the end state data of the plurality of workpieces being the state data of the plurality of workpieces to which the minimum unit of the process treatment is applied under a predetermined process condition;

receiving an input of the initial state data of an objective workpiece and target end state data of the objective workpiece;

predicting, for a plurality of combinations of the plurality of model data elements, end state data of the objective workpiece from the initial state data of the objective workpiece received, by using a corresponding combination of the plurality of combinations of the plurality of model data elements;

selecting a combination of the plurality of model data elements based on a proximity between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece received; and

determining a process condition of process treatment to be applied to the objective workpiece, based on the selected combination of the plurality of model data elements.

2. The information processing device according to claim 1 , wherein

the initial state data of, the objective workpiece includes a plurality of initial state data pieces of the objective workpiece;

the target end state data of the objective workpiece includes a plurality of target end state data pieces of the objective workpiece; and

the combination of the plurality of model data elements is selected based on a plurality of proximities between the predicted end state data of the objective workpiece and the plurality of the target end state data pieces of the objective workpiece.

3. The information processing device according to claim 1 , wherein

the state data of the workpiece includes structural information of the workpiece and material information of the workpiece, and

each of the model data elements reproduces a change in the structural information of the workpiece and a change in the material information of the workpiece.

4. The information processing device according to claim 1 , wherein the process condition includes a setting value for a control component in a process treatment executing device that applies the minimum unit of the process treatment to the workpiece.

5. The information processing device according to claim 4 , wherein

the determined process condition of the process treatment to be applied to the objective workpiece includes the setting value for the control component in the process treatment executing device, and

the processes further include outputting the setting value for the control component in the process treatment executing device, based on the determined process condition of the process treatment to be applied to the objective workpiece.

6. The information processing device according to claim 1 , wherein, in the receiving of the input,

the initial state data of the objective workpiece and the target end state data of the objective workpiece that are output from software capable of designing at least a shape of the objective workpiece are received.

7. The information processing device according to claim 1 , wherein

the predicting includes predicting, for every combination of the plurality of model data elements recorded, the end state data of the objective workpiece from the initial state data of the objective workpiece received; and

the combination of the plurality of model data elements is selected based on the predicted end state data of the objective workpiece having a largest proximity to the target end state data of the objective workpiece.

8. The information processing device according to claim 1 , wherein

the predicting includes searching for an optimal solution from among the combinations of the plurality of model data elements recorded, by machine learning using, as an evaluation value, a difference between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece.

9. The information processing device according to claim 1 , wherein

the selecting includes determining a plurality of process condition candidates based on the proximity, and

the combination of the plurality of model data elements is selected from among the plurality of process condition candidates, based on a judgement criterion specified and stored by a user in advance.

10. The information processing device according to claim 1 , wherein the selecting includes

determining a plurality of process condition candidates based on the proximity;

providing a user with the plurality of process condition candidates;

receiving, from the user, a selection of a process condition from among the plurality of process condition candidates; and

selecting the combination of the plurality of model data elements based on the selection of the process condition.

11. The information processing device according to claim 1 , wherein the process treatment is semiconductor manufacturing process treatment.

12. A process treatment executing device that applies process treatment to a workpiece, the process treatment executing device comprising:

a processor, and

a memory device storing a computer program that causes the processor to execute processes including

storing a plurality of model data elements each of which reproduces a change in state data of a workpiece, each of the model data elements being constructed, as an effect of a minimum unit of process treatment, from differential data between initial state data of a plurality of workpieces and end state data of the plurality of workpieces, the end state data of the plurality of workpieces being the state data of the plurality of workpieces to which the minimum unit of the process treatment is applied under a predetermined process condition;

receiving an input of the initial state data of an objective workpiece and target end state data of the objective workpiece;

predicting, for a plurality of combinations of the plurality of model data elements, end state data of the objective workpiece from the initial state data of the objective workpiece received, by using a corresponding combination of the plurality of combinations of the plurality of model data elements;

selecting a combination of the plurality of model data elements based on a proximity between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece received; and

determining a process condition of process treatment to be applied to, the objective workpiece, based on the selected combination of the plurality of model data elements.

13. An information processing system comprising:

a process treatment executing device configured to apply process treatment to a workpiece, and

an information processing device configured to determine the process treatment and a process condition that are applied by the process treatment executing device to the workpiece, the information processing device including a processor, and a memory device storing a computer program that causes the processor to execute processes including

storing a plurality of model data elements each of which reproduces a change in state data of a workpiece, each of the model data elements being constructed, as an effect of a minimum unit of process treatment, from differential data between initial state data of a plurality of workpieces and end state data of the plurality of workpieces, the end state data of the plurality of workpieces being, the state data of the plurality of workpieces to which the minimum unit of the process treatment is applied under a predetermined process condition;

receiving an input of the initial state data of an objective workpiece and target end state data of the objective workpiece;

predicting, for a plurality of combinations of the plurality of model data elements, end state data of the objective workpiece horn the initial state data of the objective workpiece received, by using a corresponding combination of the plurality of combinations of the plurality of model data elements;

selecting a combination of the plurality of model data elements based on a proximity between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece received; and

determining a process condition of process treatment to be applied to the objective workpiece, based on the selected comb nation of the plurality of model data elements.