Semiconductor device and method of manufacturing the same
Provided is a method of manufacturing a semiconductor device. The method includes providing a substrate, forming uneven portions in a region of the substrate in which an electrode is to be formed, forming a precursor film formed of a two-dimensional material on the substrate on which the uneven portions are formed, forming a metal chalcogen film by performing a chalcogenation process on the formed precursor film, and forming the electrode on the formed metal chalcogen film.
1. A method of manufacturing a semiconductor device, the method comprising:
providing a substrate;
forming uneven portions in a region of the substrate in which an electrode is to be formed;
forming a precursor film of a two-dimensional material on the substrate including the uneven portions;
forming a metal chalcogen film by performing a chalcogenation process on the formed precursor film; and
forming the electrode on a part of the formed metal chalcogen film,
wherein the forming of the two-dimensional material on the substrate on which the uneven portions are formed includes forming the two-dimensional material film in regions including one or more contact regions and a channel region, and
wherein the forming of the metal chalcogenide film by performing the chalcogenation process of the formed precursor film includes:
forming a two-dimensional material layer including crystalline planes oriented in a direction parallel to the substrate in the channel region; and
forming two-dimensional material layers including crystalline planes oriented in a direction perpendicular to the substrate in valley portions of the contact regions.
2. The method of claim 1 , wherein the electrode is formed on the substrate.
3. The method of claim 1 , wherein the forming of the uneven portions in the region of the substrate in which the electrode is to be formed includes forming the uneven portions in a predetermined region of a surface of a dielectric film.
4. The method of claim 1 , wherein the forming of the two-dimensional material on the substrate including the uneven portions includes forming an ultra-thin metal film or an ultra-thin film of a partially oxidized metal, which is a precursor to become a two-dimensional material.
5. The method of claim 1 , the resistivity of precursor films may be in the range of 1×10 −5 Ω· cm-10 Ω·cm.
6. The method of claim 1 , wherein one or more two-dimensional materials are stacked in the contact regions.
7. The method of claim 1 , wherein:
the contact regions include one or more two-dimensional materials among MoS 2 , MoSe 2 , MoTe 2 , WSe 2 , WS 2 , WTe 2 , ZrS 2 , ZrSe 2 , ZrTe 2 , HfSe 2 , HfS 2 , HfTe 2 , SnS 2 , SnSe 2 , SnTe 2 , InSe 2 , InS 2 , InTe 2 , TiS 2 , TiSe 2 , TiTe 2 , NbS 2 , NbSe 2 , NbTe 2 , TaS 2 , TaSe 2 , TaTe 2 , ReS 2 , ReSe 2 , ReTe 2 , VS 2 , VSe 2 , and VTe 2 ; and
the channel region includes one or more two-dimensional materials among MoS 2 , MoSe 2 , MoTe 2 , WSe 2 , WS 2 , WTe 2 , ZrS 2 , ZrSe 2 , ZrTe 2 , HfSe 2 , HfS 2 , HfTe 2 , SnS 2 , SnSe 2 , SnTe 2 , InSe 2 , InS 2 , InTe 2 , TiS 2 , TiSe 2 , TiTe 2 , NbS 2 , NbSe 2 , NbTe 2 , TaS 2 , TaSe 2 , TaTe 2 , ReS 2 , ReSe 2 , ReTe 2 , VS 2 , VSe 2 , and VTe 2 .
8. The method of claim 7 , wherein one or more two-dimensional materials are stacked in the channel region.
9. The method of claim 1 , wherein the forming of the uneven portions in the region of the substrate on which the electrode is to be formed includes forming a lower electrode having the uneven portions formed in advance.
10. The method of claim 9 , further comprising forming semiconductor layers including one or more layers on the lower electrode.
11. The method of claim 1 , wherein a thickness of the metal chalcogenide film ranges from 0.6 nm to 20 nm.
12. The method of claim 1 , wherein valley portions of the uneven portions have an angle of 120 degrees or less.