Apparatus and method for treating substrate
An apparatus for treating a substrate includes a chamber having a treatment space in which the substrate is treated, a substrate support unit that supports the substrate in the treatment space, a gas supply unit that supplies a gas into the treatment space, an exhaust line connected to the chamber, and a pressure-reducing member that reduces pressure in the exhaust line and releases process by-products generated in the treatment space. The exhaust line includes a first line connected to the chamber, a second line equipped with the pressure-reducing member, and a filter tube that connects the first line and the second line, and the filter tube has a corrugated side surface.
1. An apparatus for treating a substrate, the apparatus comprising: a chamber having a treatment space in which the substrate is treated; a substrate support unit configured to support the substrate in the treatment space; a gas supply unit configured to supply a gas into the treatment space; an exhaust line connected to the chamber; and a pressure-reducing member configured to reduce pressure in the exhaust line and release process by-products generated in the treatment space, wherein the exhaust line includes: a first line connected to the chamber; a second line equipped with the pressure-reducing member; and a filter tube configured to connect the first line and the second line, and wherein the filter tube has a corrugated side surface, and wherein the filter tube is formed of a material having a higher thermal conductivity than first line and the second line such that the filter tube radiates heat from inside the filter tube to outside the filter tube and the filter tube maintains a temperature of the filter tube that is lower than a temperature of the first line and the second line.
2. The apparatus of claim 1 , wherein the filter tube is detachable from the first line and the second line.
3. The apparatus of claim 2 , wherein an outer circumferential surface of the filter tube has a corrugated shape, and
wherein the filter tube has a lower temperature than the first line and the second line.
4. The apparatus of claim 3 , wherein the second line is equipped with a valve configured to open or close the exhaust line.
5. The apparatus of claim 1 , wherein the filter tube has a corrugated outer circumferential surface, and
wherein the filter tube includes:
a body having opposite open ends; and
an inner protrusion protruding from an inner surface of the body.
6. The apparatus of claim 5 , wherein the inner protrusion has a spiral shape configured to surround a central axis of the body.
7. The apparatus of claim 5 , wherein the inner protrusion includes a plurality of inner protrusions having an annular ring shape and arranged along a lengthwise direction of the body.
8. The apparatus of claim 5 , wherein in a cut section obtained by cutting the filter tube in a lengthwise direction, the inner protrusion is provided to be inclined such that a direction from the inner surface of the body toward an inside end thereof is oriented in an upstream direction of the filter tube with an approach to a central axis of the body.
9. An exhaust unit for releasing process by-products generated in a treatment space of a chamber, the exhaust unit comprising: an exhaust line connected to the chamber; and a pressure-reducing member configured to reduce pressure in the exhaust line, wherein the exhaust line includes: a first line connected to the chamber; a second line equipped with the pressure-reducing member; and a filter tube configured to connect the first line and the second line, and wherein the filter tube has a corrugated side surface, and wherein the filter tube is formed of a material having a higher thermal conductivity than the first line and the second line such that the filter tube radiates heat from inside the filter tube to outside the filter tube and the filter tube maintains a temperature of the filter tube that is lower than a temperature of the first line and the second line, wherein temperature outside the filter tube is lower than temperature inside the filter tube, and wherein the filter tube is formed of a material having a higher thermal conductivity than the first line and the second line.
10. The exhaust unit of claim 9 , wherein the filter tube is detachable from the first line and the second line.
11. The exhaust unit of claim 10 , wherein an outer circumferential surface of the filter tube has a corrugated shape, and
wherein the filter tube has a lower temperature than the first line and the second line.
12. The exhaust unit of claim 11 , wherein the second line is equipped with a valve configured to open or close the exhaust line.
13. The exhaust unit of claim 10 , wherein the filter tube has a corrugated outer circumferential surface, and
wherein the filter tube includes:
a body having opposite open ends; and
an inner protrusion protruding from an inner surface of the body.
14. The exhaust unit of claim 13 , wherein in a cut section obtained by cutting the filter tube in a lengthwise direction, the inner protrusion is provided to be inclined such that a direction from the inner surface of the body toward an inside end thereof is oriented in an upstream direction of the filter tube with an approach to a central axis of the body.