IP Library › Granted Patent US 11,244,890
Granted Patent B2
US 11,244,890 · App. 17/074,820 · Granted Feb 8, 2022

Ground via clustering for crosstalk mitigation

Inventors: Zhiguo Qian (Chandler, AZ); Kemal Aygun (Tempe, AZ); Yu Zhang (Raleigh, NC)
Assignee: Intel Corporation
H01L23/49827H01L23/49816H01L23/49838H01L21/486H01L2924/0002
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Quick Facts
Patent No.
US 11,244,890
App. No.
17/074,820
Granted
Feb 8, 2022
Kind
B2
Abstract

Embodiments of the present disclosure are directed towards techniques and configurations for ground via clustering for crosstalk mitigation in integrated circuit (IC) assemblies. In some embodiments, an IC package assembly may include a first package substrate configured to route input/output (I/O) signals and ground between a die and a second package substrate. The first package substrate may include a plurality of contacts disposed on one side of the first package substrate and at least two ground vias of a same layer of vias, and the at least two ground vias may form a cluster of ground vias electrically coupled with an individual contact. Other embodiments may be described and/or claimed.

Claims (44)

1. A semiconductor package, comprising:

a first package substrate having a first side and a second side, the first side opposite the second side, the first package substrate comprising:

a layer comprising a semiconductor material;

a first ground interconnect structure between the first side and the second side of the first package substrate;

a second ground interconnect structure between the first side and the second side of the first package substrate, wherein the first ground interconnect structure and the second ground interconnect structure extend through the layer comprising the semiconductor material; and

a ball pad on the second side of the first package substrate, the ball pad having a footprint, wherein the first ground interconnect structure and the second ground interconnect structure are in contact with the ball pad, and wherein the first ground interconnect structure is entirely within the footprint of the ball pad, and the second ground interconnect structure is only partially within the footprint of the ball pad; and

a die coupled to the first side of the first package substrate; and

a second package substrate coupled to the second side of the first package substrate.

2. The semiconductor package of claim 1 , further comprising an additional ground interconnect structure between the first side and the second side of the first package substrate, the additional ground interconnect structure through the layer comprising the semiconductor material, and the additional ground interconnect structure in contact with the ball pad.

3. The semiconductor package of claim 2 , wherein the additional ground interconnect structure is only partially within the footprint of the ball pad.

4. The semiconductor package of claim 1 , wherein the ball pad comprises copper.

5. A semiconductor package, comprising:

a first package substrate having a first side and a second side, the first side opposite the second side, the first package substrate comprising:

a layer comprising a semiconductor material;

a first ground interconnect structure between the first side and the second side of the first package substrate;

a second ground interconnect structure between the first side and the second side of the first package substrate, wherein the first ground interconnect structure and the second ground interconnect structure extend through the layer comprising the semiconductor material; and

a ball pad on the second side of the first package substrate, the ball pad having a footprint, wherein the first ground interconnect structure and the second ground interconnect structure are in contact with the ball pad, and wherein the first ground interconnect structure is only partially within the footprint of the ball pad, and the second ground interconnect structure is only partially within the footprint of the ball pad; and

a die coupled to the first side of the first package substrate; and

a second package substrate coupled to the second side of the first package substrate.

6. The semiconductor package of claim 5 , further comprising an additional ground interconnect structure between the first side and the second side of the first package substrate, the additional ground interconnect structure through the layer comprising the semiconductor material, and the additional ground interconnect structure in contact with the ball pad.

7. The semiconductor package of claim 6 , wherein the additional ground interconnect structure is only partially within the footprint of the ball pad.

8. The semiconductor package of claim 5 , wherein the ball pad comprises copper.

9. A semiconductor package, comprising:

a package substrate having a first side and a second side, the first side opposite the second side, the package substrate comprising:

a ball pad on the second side of the package substrate, the ball pad having a footprint; and

a vertical interconnect between the first side and the second side of the package substrate, the vertical interconnect comprising a first ground conductive via laterally adjacent to a second ground conductive via, wherein the first ground conductive via and the second ground conductive via are both in direct contact with the ball pad, and wherein the first ground conductive via is entirely within the footprint of the ball pad, and the second ground conductive via is only partially within the footprint of the ball pad;

a die coupled to the first side of the package substrate, the die having a footprint; and

a solder ball coupled to the bond pad on the second side of the package substrate, the solder ball outside of the footprint of the die.

10. The semiconductor package of claim 9 , wherein the package substrate is a multi-layer package substrate comprising one or more conductive layers, and wherein the first ground conductive via and the second ground conductive via are between the ball pad and one of the one or more conductive layers.

11. The semiconductor package of claim 10 , wherein the one of the one or more conductive layers is a layer immediately above the first ground conductive via and the second ground conductive via.

12. The semiconductor package of claim 9 , wherein the first ground conductive via and the second ground conductive via extend fully between the first side and the second of the package substrate.

13. The semiconductor package of claim 9 , the first ground conductive via and the second ground conductive are coupled to electrical routing in the package substrate, the electrical routing coupled to the die.

14. The semiconductor package of claim 9 , wherein the vertical interconnect further comprises a third ground conductive via laterally adjacent to the first and second ground conductive vias, wherein the third conductive via is in direct contact with the ball pad, and wherein the third ground conductive via is only partially within the footprint of the ball pad.

15. A semiconductor package, comprising:

a package substrate having a first side and a second side, the first side opposite the second side, the package substrate comprising:

a ball pad on the second side of the package substrate, the ball pad having a footprint; and

a vertical interconnect between the first side and the second side of the package substrate, the vertical interconnect comprising a first ground conductive via laterally adjacent to a second ground conductive via, wherein the first ground conductive via and the second ground conductive via are both in direct contact with the ball pad, and wherein the first ground conductive via is only partially within the footprint of the ball pad, and the second ground conductive via is only partially within the footprint of the ball pad;

a die coupled to the first side of the package substrate, the die having a footprint; and

a solder ball coupled to the bond pad on the second side of the package substrate, the solder ball outside of the footprint of the die.

16. The semiconductor package of claim 15 , wherein the package substrate is a multi-layer package substrate comprising one or more conductive layers, and wherein the first ground conductive via and the second ground conductive via are between the ball pad and one of the one or more conductive layers.

17. The semiconductor package of claim 16 , wherein the one of the one or more conductive layers is a layer immediately above the first ground conductive via and the second ground conductive via.

18. The semiconductor package of claim 15 , wherein the first ground conductive via and the second ground conductive via extend fully between the first side and the second of the package substrate.

19. The semiconductor package of claim 15 , the first ground conductive via and the second ground conductive are coupled to electrical routing in the package substrate, the electrical routing coupled to the die.

20. The semiconductor package of claim 15 , wherein the vertical interconnect further comprises a third ground conductive via laterally adjacent to the first and second ground conductive vias, wherein the third conductive via is in direct contact with the ball pad, and wherein the third ground conductive via is only partially within the footprint of the ball pad.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 28, 2021
From: QIAN, ZHIGUO; AYGUN, KEMAL; ZHANG, YU
To: INTEL CORPORATION
Reel/Frame 058491/0964 →
Continuity (6)
Continuation 16509387 · Jul 11, 2019
Continuation 16026824 · Jul 3, 2018
Continuation 15369659 · Dec 5, 2016
Continuation 14943880 · Nov 17, 2015
Continuation 14575956 · Dec 18, 2014
Related Publication 20210057321A1 · Feb 25, 2021