Vibration device
A vibration device has a substrate including a first surface and a second surface located on an opposite side to the first surface, a heater provided on the first surface side of the substrate, a temperature sensor provided on the first surface side of the substrate, a vibration element disposed on the first surface side of the substrate, a lid including a third surface joined on the first surface side and a fourth surface located on an opposite side to the third surface, and a circuit provided on one of the first surface, the second surface and the fourth surface, and including a temperature control circuit configured to control the heater based on an output of the temperature sensor.
1. A vibration device comprising:
a substrate provided with a first surface and a second surface located on an opposite side to the first surface;
a heater provided on the first surface side of the substrate;
a temperature sensor provided on the first surface side of the substrate;
a vibration element disposed on the first surface side of the substrate;
a lid provided with a third surface joined on the first surface side, and a fourth surface located on an opposite side to the third surface; and
a circuit provided on the fourth surface and including a temperature control circuit configured to control the heater based on an output of the temperature sensor,
wherein the lid has a first through electrode passing through the third surface and the fourth surface, and electrically connecting the heater and the circuit, and a second through electrode passing through the third surface and the fourth surface, and electrically connecting the temperature sensor and the circuit.
2. The vibration device according to claim 1 ,
wherein the circuit has an oscillation circuit, and
the lid has a third through electrode passing through the third surface and the fourth surface, and electrically connecting the vibration element and the circuit.
3. The vibration device according to claim 1 , comprising:
an insulating layer provided on the fourth surface side of the lid, and covering the circuit.
4. A vibration device comprising:
a substrate provided with a first surface and a second surface located on an opposite side to the first surface;
a heater provided on the first surface side of the substrate;
a temperature sensor provided on the first surface side of the substrate;
a vibration element disposed on the first surface side of the substrate;
a lid provided with a third surface joined on the first surface side, and a fourth surface located on an opposite side to the third surface; and
a circuit provided on the second surface and including a temperature control circuit configured to control the heater based on an output of the temperature sensor,
wherein the substrate has a first through electrode passing through the first surface and the second surface, and electrically connecting the heater and the circuit, and a second through electrode passing through the first surface and the second surface, and electrically connecting the temperature sensor and the circuit.
5. The vibration device according to claim 4 ,
wherein the circuit has an oscillation circuit, and
the substrate has a third through electrode passing through the first surface and the second surface, and electrically connecting the vibration element and the circuit.
6. The vibration device according to claim 4 , comprising:
an insulating layer provided on the second surface side of the substrate, and covering the circuit.
7. The vibration device according to claim 2 ,
wherein the circuit includes a temperature compensation circuit configured to perform temperature compensation of an oscillation signal from the oscillation circuit based on the output of the temperature sensor.