IP Library › Granted Patent US 11,249,051
Granted Patent B2
US 11,249,051 · App. 16/286,675 · Granted Feb 15, 2022

Control method, inspection system, and storage medium

Inventors: Toshiyuki Ono (Kanagawa, JP); Atsushi Matsumura (Kanagawa, JP)
Assignee: KABUSHIKI KAISHA TOSHIBA
G01N29/069G01N29/0609G01N29/0672G01N29/11G01N29/12G01N29/265G01N29/4409G01N29/48G01N2291/015G01N2291/106G01N2291/267
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Quick Facts
Patent No.
US 11,249,051
App. No.
16/286,675
Granted
Feb 15, 2022
Kind
B2
Abstract

According to one embodiment, a control method includes setting a transmission angle of an ultrasonic wave to a standard angle. The control method further includes transmitting an ultrasonic wave at the set transmission angle and detecting an intensity of a reflected wave from an object. The control method further includes calculating a tilt angle based on a gradient of the intensity. The tilt angle indicates a tilt of the object. The control method further includes resetting the transmission angle based on the tilt angle.

Claims (49)

1. A control method, comprising:

transmitting an ultrasonic wave at a set transmission angle;

detecting an intensity of a reflected wave from an object at a plurality of points in a transmitting direction of the ultrasonic wave; and

calculating a gradient of the intensity for each of the plurality of points based on the detected intensity at the plurality of points and calculating a tilt angle based on the gradient of the intensity, the tilt angle indicating a tilt of the object.

2. The method according to claim 1 , further comprising resetting the transmission angle based on the tilt angle.

3. The method according to claim 1 , further comprising causing a displayer to display information based on the tilt angle.

4. The method according to claim 2 , wherein the detecting and the calculating are performed again after the resetting.

5. The method according to claim 2 , wherein

a first loop of repeating the detecting, the calculating, and the resetting is performed after the resetting,

the first loop includes determining whether or not the first loop has ended, and

the first loop is performed until the determining determines that the first loop has ended.

6. The method according to claim 5 , wherein the determining determines that the first loop has ended when a number of repetitions of the detecting or the calculating reaches a prescribed number of times or more.

7. The method according to claim 5 , wherein

a difference between a first tilt angle and a second tilt angle is calculated when a plurality of the tilt angles is calculated by the first loop, the plurality of tilt angles including the first tilt angle and the second tilt angle, the second tilt angle being calculated after the first tilt angle, and

the determining determines that the first loop has ended when the difference is less than a prescribed value.

8. The method according to claim 5 , further comprising displaying a transition of the transmission angle or the tilt angle caused by the first loop.

9. The method according to claim 2 , wherein the resetting causes a change of the transmission angle to be larger than a difference between a standard angle and the tilt angle.

10. The method according to claim 1 , wherein

the detecting includes multiply detecting the intensity at a plurality of points,

the plurality of points is arranged along a second direction and a third direction,

the second direction crosses a first direction,

the ultrasonic wave is transmitted in the first direction,

the third direction crosses a plane including the first direction and the second direction, and

the calculating calculates the tilt angle based on the gradient of the intensity in three-dimensional space defined by the first direction, the second direction, and the third direction.

11. A control method, comprising:

transmitting an ultrasonic wave at a set transmission angle and detecting, at a plurality of points, an intensity of a reflected wave from an object, the plurality of points is arranged along a second direction and a third direction, the second direction crossing a first direction, the ultrasonic wave being transmitted in the first direction, the third direction crossing a plane including the first direction and the second direction;

calculating a tilt angle for each of the plurality of points based on a gradient of the intensity, the tilt angle indicating a tilt of the object; and

causing a displayer to display the tilt angle for each of the plurality of points.

12. An inspection system, comprising:

a probe including a sensor, configured to perform a transmission and a reception of an ultrasonic wave; and

a processor

cause the probe to transmit the ultrasonic wave at a set transmission angle and detect an intensity of a reflected wave from an object at a plurality of points in a transmitting direction of the ultrasonic wave, and

calculating a gradient of the intensity for each of the plurality of points based on the detected intensity at the plurality of points and calculating a tilt angle based on a gradient of the intensity, the tilt angle indicating a tilt of the object.

13. The inspection system according to claim 12 , wherein

the probe includes a plurality of sensors, and

the probe detects the intensity of the reflected wave from the object at a plurality of points,

the plurality of points is arranged along a second direction and a third direction,

the second direction crosses a first direction,

the ultrasonic wave is transmitted in the first direction, and

the third direction crosses a plane including the first direction and the second direction.

14. The inspection system according to claim 12 , wherein the processor resets the transmission angle based on the tilt angle between the probe and the object.

15. The inspection system according to claim 12 , wherein

the processor

detects the intensity of the reflected wave at a plurality of points in a transmitting direction of the ultrasonic,

calculates a gradient of the intensity for each of the plurality of points based on the detected intensity at the plurality of points, and calculates the tilt angle based on a plurality of the gradients.

16. A non-transitory computer-readable storage medium storing a program causing a processor to perform at least:

causing a probe to transmit an ultrasonic wave at a set transmission angle and detect an intensity of a reflected wave from an object at a plurality of points in a transmitting direction of the ultrasonic wave; and

calculating a gradient of the intensity for each of the plurality of points based on the detected intensity at the plurality of points and calculating a tilt angle based on the gradient of the intensity, the tilt angle indicating a tilt of the object.

17. The non-transitory computer-readable storage medium according to claim 16 , wherein the program further causes the processor to perform resetting the transmission angle based on the tilt angle.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2019
From: ONO, TOSHIYUKI; MATSUMURA, ATSUSHI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 048449/0017 →
Priority Claims (1)
JP JP2018-130611 · Jul 10, 2018 · national
Continuity (1)
Related Publication 20200018727A1 · Jan 16, 2020
Cited By (2)
US 12,332,213 US 12,461,073