Strontium tetraborate as optical glass material
Strontium tetraborate can be used as an optical material. Strontium tetraborate exhibits high refractive indices, high optical damage threshold, and high microhardness. The transmission window of strontium tetraborate covers a very broad range of wavelengths, from 130 nm to 3200 nm, making the material particularly useful at VUV wavelengths. An optical component made of strontium tetraborate can be incorporated in an optical system, such as a semiconductor inspection system, a metrology system, or a lithography system. These optical components may include mirrors, lenses, lens arrays, prisms, beam splitters, windows, lamp cells or Brewster-angle optics.
1. An optical system comprising:
a stage for supporting a sample;
a light source; and
one or more linear optical components configured to direct light from the light source to the sample, wherein at least a portion of the one or more linear optical components are formed from strontium tetraborate.
2. The optical system of claim 1 , wherein the strontium tetraborate comprises a glass phase.
3. The optical system of claim 1 , wherein the one or more linear optical components comprise at least one of a mirror, a lens, a lens array, a prism, a beam splitter, a window, or a lamp cell.
4. The optical system of claim 1 , wherein at least one of the one or more linear optical components is configured to operate substantially at Brewster's angle relative to a direction of polarization of light incident on said at least one of the one or more linear optical components.
5. The optical system of claim 1 , wherein the light source is configured to emit light having a wavelength within a range from 130 nm to 400 nm.
6. The optical system of claim 1 , wherein the light source is a broadband ultraviolet lamp comprising at least one of a window or a lamp cell, wherein at least a portion of the at least one of the window or the lamp cell is formed from strontium tetraborate.
7. The optical system of claim 6 , wherein the broadband ultraviolet lamp is configured to emit a wavelength within a range from 130 nm to 400 nm.
8. The optical system of claim 1 , wherein the optical system is configured as a semiconductor characterization system.
9. The optical system of claim 8 , wherein the optical system comprises at least one of a semiconductor inspection system or a semiconductor metrology system.
10. The optical system of claim 8 , wherein the optical system comprises:
a sensor, wherein the one or more linear optical components formed from strontium tetraborate are configured to direct light reflected or scattered from the sample to the sensor.
11. The optical system of claim 1 , wherein the optical system comprises a lithographic system.