Device for transferring and integrating micro-devices and method of transfer
A device for transferring micro-devices from a holding device to a final surface, avoiding damage during the process and ensuring coplanar presentation onto the final surface, includes a first substrate on the holding device. The holding device carries at least one transfer substrate which itself carries a plurality of micro-devices. At least one buffering member is located between the first substrate and the transfer substrate. The buffering member provides a small range of buffering for the micro-devices during the transfer and also compensates for any slight unevenness when the micro-devices are laid on and bonded to the final surface. A method for transferring the micro-devices is also disclosed.
1. A transfer device for transferring micro-devices to a receiving substrate, comprising:
a first substrate;
at least one transferring substrate located on the first substrate and each of the transferring substrate configured for carrying a plurality of micro-devices; and
at least one buffering member located between the first substrate and the transfer substrate, wherein the buffering member is used for providing a buffering for the micro-devices; wherein the buffering member comprises a plurality of magnets groups, each of the magnets groups comprises a first magnet and a second magnet, a magnetic field direction of the first magnet and that of the second magnet are opposite to each other, and the first magnet and the second magnet in each magnets group are located face to face to interact magnetically.
2. The transfer device of claim 1 . wherein the first substrate has a plurality of wells recessed from the first substrate;
the transfer device further comprises a plurality of platforms, each of the wells accommodates with one of the platforms;
the buffering member comprises a plurality of buffering members, each of the buffering members is located between one of the wells and one of platforms accommodated in the well; and
the transfer substrate comprises a plurality of transfer substrate, each of the transfer substrates is supported by one of the platforms.
3. The transfer device of claim 2 , wherein
the first magnet is embedded on a sidewall of one of the wells, the second magnet is embedded on a sidewall of one of the platforms.
4. The transfer device of claim 2 , wherein a material of each platform is opaque, each of the platforms has an opening exposing one of the transfer substrates;
at least one ultraviolet light source is located on a bottom surface of each of the wells; and
the transfer device further comprises a plurality of adhesive layers configured to bond the micro-devices and the transfer substrates.
5. The transfer device of claim 2 , wherein a material of each platform is transparent;
at least one ultraviolet light source is located on a bottom surface of each of the wells; and
the transfer device further comprises a plurality of adhesive layers configured to bond the micro-devices and the transfer substrates.
6. A method for transferring micro-devices, comprises:
providing a transfer device, wherein the transfer device comprises a first substrate and at least one transfer substrate located on the first substrate, at least one buffering member is located between the first substrate and the at least one transfer substrate, the buffering member comprises a plurality of magnets groups, each of the magnets groups comprises a first magnet and a second magnet, a magnetic field direction of the first magnet and that of the second magnet are opposite to each other, and the first magnet and the second magnet in each magnets group are located face to face to interact magnetically:
forming a plurality of micro-devices on the at least one transfer substrate;
providing a receiving substrate, aligning the receiving substrate to the at least one transfer substrate;
pressuring the receiving substrate or the transfer device to bond the micro-devices to the receiving substrate, wherein the buffering member provides a buffering for the micro-devices when pressuring the receiving substrate or the transfer device; and
removing the transfer substrate.
7. A method for transferring micro-devices, comprises:
providing a transfer device, wherein the transfer device comprises a first substrate, a plurality of transfer substrate, a plurality of platforms and a plurality of buffering members; the first substrate has a plurality of wells recessed from the first substrate; each of the wells accommodates with one of the platforms; each of the buffering members is located between one of the wells and one of the platforms accommodated in the well; each of the transfer substrates is supported by one of the platforms; at least one ultraviolet light source is located on a bottom surface of each of the wells;
forming a plurality of micro-devices on the transfer substrate, the micro-devices are bonded to the transfer substrates by a plurality of adhesive layers;
providing a receiving substrate, aligning the receiving substrate to the transfer substrates;
pressuring the receiving substrate or the transfer device to bond the micro-devices to the receiving substrate, wherein the buffering member provides a buffering space for the micro-devices when pressuring the receiving substrate or the transfer device;
turning on the at least one ultraviolet light source, wherein the adhesive layer are irradiated by ultraviolet lights emitted from the at least one ultraviolet light source; and
removing the transfer substrate.
8. The method of claim 7 , wherein the platforms are opaque, each of the platforms has an opening exposing one of the transfer substrates.
9. The method of claim 7 , wherein the platforms are transparent.