Strain gauge with increased resistor protection
A strain gauge includes a flexible resin substrate, and a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate. The strain gauge includes a resistor formed as a film containing Cr, CrN, and Cr 2 N, on one surface of the functional layer. The strain gauge includes an insulating layer formed of an inorganic material, the resistor being coated with the insulating layer. The strain gauge includes an insulating resin layer formed of an organic material, the insulating layer being coated with the insulating resin layer.
1. A strain gauge comprising:
a flexible resin substrate;
a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate;
a resistor formed as a film containing Cr, CrN, and Cr 2 N, on one surface of the functional layer;
an insulating layer formed of an inorganic material, the resistor being coated with the insulating layer; and
an insulating resin layer formed of an organic material, the insulating layer being coated with the insulating resin layer.
2. The strain gauge according to claim 1 , further comprising electrodes electrically connected to the resistor,
wherein each electrode includes:
a terminal section extending from a given end portion of the resistor; and
a metallic layer formed on the terminal section,
wherein the insulating layer is an oxide film of a metal that constitutes the metallic layer.
3. The strain gauge according to claim 1 , wherein a main component of the resistor is alpha-chromium.
4. The strain gauge according to claim 3 , wherein the resistor includes alpha-chromium at 80% by weight or more.
5. The strain gauge according to claim 1 , wherein the functional layer includes a function of promoting crystal growth of the resistor.