MEMS device and electronic apparatus

1. A MEMS device, comprising:

a cap;

a first substrate and a second substrate opposite to the first substrate, the first substrate and the second substrate being connected with each end of the cap via a bond line, respectively;

a movable member mounted on the first substrate;

a micro-LED mounted on the movable member and configured for moving with the movable member;

a first optical detector and a second optical detector mounted on the cap to face the micro-LED and configured for sensing light in a front of the micro-LED; and

a third optical detector mounted in a lateral direction of the micro-LED and configured for sensing light in the lateral direction of the micro-LED.

2. The MEMS device according to claim 1 , wherein the movable member is configured for moving according to the at least one of the following factors: acceleration of the MEMS device, pressure applied on the movable member, and force applied on the movable member.

3. The MEMS device according to claim 2 , wherein at least one of the first optical detector, the second optical detector, and the third optical detector is configured for sensing a mechanical displacement of the micro-LED caused by the movement of the movable member and outputting a sensing signal reflecting the mechanical displacement.

4. An electronic apparatus, comprising the MEMS device according to claim 1 .

5. The MEMS device according to claim 1 ,

wherein at least one of the first optical detector, the second optical detector, and the third optical detector is configured for sensing a displacement of the light emitted by the micro-LED.

6. The MEMS device according to claim 1 , wherein the movable member is configured for moving according to a flow applied on the movable member.

7. The MEMS device according to claim 1 , wherein the movable member is configured for moving according to an angular speed of the MEMS device.