IP Library Granted Patent US 11,262,604
Granted Patent B2
US 11,262,604 · App. 16/227,846 · Granted Mar 1, 2022

Photonic devices

Inventors: Mohammad Soltani (Belmont, MA); Eduardo M. Chumbes (Andover, MA)
Assignees: Raytheon BBN Technologies Corp.; Raytheon Company
G02F1/01716G02F1/01708H01S5/125G02F2202/108H01L29/2003H01L29/7783H01S5/343
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Quick Facts
Patent No.
US 11,262,604
App. No.
16/227,846
Granted
Mar 1, 2022
Kind
B2
Abstract

Photonic devices having Al 1-x Sc x N and Al y Ga 1-y N materials, where Al is Aluminum, Sc is Scandium, Ga is Gallium, and N is Nitrogen and where 0<x≤0.45 and 0≤y≤1.

Claims (12)

1. A photonic device comprising: a Group III-Nitride photonic waveguiding layer with in-plane light propagation; and a cladding layer disposed on the Group III-Nitride photonic waveguiding layer; the cladding layer comprising Al 1-x Sc x N where 0<x≤0.45 and the cladding layer disposed on the Group III-Nitride photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride photonic waveguiding layer while also providing crystalline lattice matching layer to the Group III-Nitride photonic waveguiding layer.

2. The photonic device recited in claim 1 wherein the photonic waveguiding layer is a material comprising Al y Ga 1-y N where Al is Aluminum, Ga is Gallium, N is Nitrogen and where 0≤y≤1.

3. A photonic device comprising: a Group III-Nitride photonic waveguiding layer with in-plane light propagation and a cladding layer comprising Al 1-x Sc x N material layer, where Al is Aluminum; Sc is Scandium; N is Nitrogen; 0<x≤0.45 and the cladding layer disposed on the Group III-Nitride photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride photonic waveguiding layer while also providing crystalline lattice matching layer to the Group III-Nitride photonic waveguiding layer.

4. A photonic device having a Group III-Nitride photonic waveguiding layer with in-plane light propagation comprising: an Al 1-x Sc x N layer and an Al y Ga 1-y N layer, Al is Aluminum, Sc is Scandium, N is Nitrogen and where 0<x≤0.45 and 0≤y≤1; and

a cladding layer disposed on the Group III-Nitride photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride photonic waveguiding layer while also providing crystalline lattice matching layer to the Group III-Nitride photonic waveguiding layer.

5. A structure having a photonic waveguiding layer comprising: a layer comprising a single crystal photonic waveguiding layer with in-plane light propagation; and an Aluminum Scandium Nitride cladding layer disposed on the single crystal photonic waveguiding layer; the cladding layer disposed on the single crystal photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device while also providing crystalline lattice matching layer to the single crystal photonic waveguiding layer.

6. The structure recited in claim 5 wherein the single crystal photonic waveguiding layer comprises: a Group III-Nitride compound; and the Aluminum Scandium Nitride cladding layer comprises Aluminum Scandium Nitride.

7. A photonic device comprising: a Group III-Nitride quantum well photonic waveguiding layer with in-plane light propagation; and a Al 1-x Sc x N cladding layer disposed on the Group III-Nitride quantum well photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride quantum well photonic waveguiding layer while also providing crystalline lattice matching layer to the Group III-Nitride quantum well photonic waveguiding layer and where 0<x≤0.45.

8. The photonic device recited in claim 7 wherein, the Group III-Nitride quantum well photonic waveguiding layer comprises a stack of Al y Ga 1-y N and In z Ga 1-z N layers where 0<z≤1 and 0≤y≤1.

9. A structure comprising: a photonic waveguiding layer; and an Aluminum Scandium Nitride cladding layer disposed on the photonic waveguiding layer; the Aluminum Scandium Nitride cladding layer disposed on the photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the photonic waveguiding layer while also providing crystalline lattice matching layer to the photonic waveguiding layer.

10. A photonic device comprising: a quantum well photonic waveguiding layer with in-plane light propagation comprising: a Group III-N material; and a Al 1-x Sc x N cladding layer disposed on the quantum well photonic waveguiding layer, where: 0<x≤0.45, the Al 1-x Sc x N cladding layer having a lower refractive index than the index of refraction of a the quantum well photonic waveguiding layer; and the cladding layer providing a lower refractive index at the operating wavelength of the photonic device to the quantum well photonic waveguiding layer while also providing crystalline lattice matching layer to the quantum well photonic waveguiding layer.

11. A photonic device having a photonic waveguiding layer comprising a Group III-Nitride quantum well waveguiding layer with in-plane light propagation having a cladding layer disposed on the Group III-Nitride quantum well waveguiding layer comprising Al 1-x Sc x N, where: 0<x≤0.45; and the cladding layer disposed on the Group III-Nitride quantum well waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the photonic waveguiding layer while also providing crystalline lattice matching layer to the photonic waveguiding layer.

Assignments (3)
CHANGE OF NAME Recorded Aug 22, 2024
From: RAYTHEON BBN TECHNOLOGIES CORP.
To: RTX BBN TECHNOLOGIES, INC.
Reel/Frame 068748/0419 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 21, 2018
From: CHUMBES, EDUARDO M.
To: RAYTHEON COMPANY
Reel/Frame 047839/0486 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 21, 2018
From: SOLTANI, MOHAMMAD
To: RAYTHEON BBN TECHNOLOGIES CORP.
Reel/Frame 047839/0546 →
Continuity (3)
Provisional Application 62670273 · May 11, 2018
Provisional Application 62670261 · May 11, 2018
Related Publication 20190346705A1 · Nov 14, 2019