Transistors with reduced defect and methods forming same
A device includes a semiconductor region, an interfacial layer over the semiconductor region, the interfacial layer including a semiconductor oxide, a high-k dielectric layer over the interfacial layer, and an intermixing layer over the high-k dielectric layer. The intermixing layer includes oxygen, a metal in the high-k dielectric layer, and an additional metal. A work-function layer is over the intermixing layer. A filling-metal region is over the work-function layer.
1. A method comprising:
forming an interfacial layer over a semiconductor region, wherein the interfacial layer comprises a semiconductor oxide;
depositing a high-k dielectric layer over the interfacial layer;
depositing a blocking layer over the high-k dielectric layer;
depositing a metal layer over the blocking layer;
performing an annealing process when the metal layer is over the blocking layer, wherein an intermixing layer is formed between the blocking layer and the high-k dielectric layer by the annealing process, and wherein the intermixing layer comprises a metal diffused from the metal layer; and
removing the metal layer.
2. The method of claim 1 further comprising:
removing the blocking layer to reveal the intermixing layer;
forming a work-function layer over the intermixing layer; and
forming a metal-containing capping layer over the work-function layer.
3. The method of claim 1 further comprising forming a work-function layer over the intermixing layer.
4. The method of claim 1 , wherein the depositing the metal layer comprises depositing a metal selected from the group consisting of aluminum, titanium, hafnium, zirconium, chromium, tungsten, vanadium, molybdenum, and combinations thereof.
5. The method of claim 1 , wherein the annealing process is performed at a temperature in a range between about 400° C. and about 535° C.
6. The method of claim 1 , wherein the intermixing layer further comprises oxygen deprived from the interfacial layer.
7. A method comprising:
forming an oxide layer over a semiconductor region;
depositing a high-k dielectric layer over the oxide layer;
depositing a blocking layer over the high-k dielectric layer;
depositing a metal layer over the blocking layer; and
performing an annealing process to form an intermixing layer between the high-k dielectric layer and the metal layer, wherein the intermixing layer comprises a metal oxide, with a metal in the metal oxide being diffused from the metal layer, and wherein an additional metal oxide layer is formed between the blocking layer and the metal layer by the annealing process.
8. The method of claim 7 further comprising, after the annealing process, removing the metal layer.
9. The method of claim 7 , wherein after the annealing process, the metal layer is substantially un-oxidized.
10. The method of claim 7 , wherein the annealing process is performed using a process gas selected from the group consisting of N 2 , H 2 , Ar, He, and combinations thereof.
11. The method of claim 7 , wherein the depositing the metal layer comprises depositing an aluminum layer.
12. The method of claim 7 further comprising, depositing a work-function layer over the intermixing layer.
13. The method of claim 12 further comprising removing the metal layer before the depositing the work-function layer.
14. The method of claim 7 , wherein the annealing process is performed at a temperature in a range between about 400° C. and about 535° C.
15. The method of claim 7 , wherein the additional metal oxide layer comprises an additional metal oxide of a metal in the metal layer.
16. A method comprising:
forming an interfacial layer over a silicon germanium region, wherein the interfacial layer comprises a silicon oxide and a germanium oxide;
depositing a high-k dielectric layer over the interfacial layer;
depositing a blocking layer over the high-k dielectric layer;
depositing a metal layer over the blocking layer; and
performing an annealing process, wherein in the annealing process, the germanium oxide in the interfacial layer is decomposed as geranium and oxygen, and the silicon oxide in the interfacial layer remains.
17. The method of claim 16 , wherein the oxygen generated from decomposed germanium oxide diffuses to an interface region between the blocking layer and the high-k dielectric layer to form an intermixing layer, and wherein the intermixing layer comprises oxygen, a first metal from the blocking layer, a second metal from the metal layer, and a third metal from the high-k dielectric layer.
18. The method of claim 17 further comprising:
removing the block layer to reveal the intermixing layer; and
depositing a work-function layer over the intermixing layer.
19. The method of claim 16 , wherein the germanium generated from decomposed germanium oxide diffuses into a surface layer of the silicon germanium region.
20. The method of claim 16 further comprising, after the annealing process, removing the metal layer.