IP Library › Granted Patent US 11,269,254
Granted Patent B2
US 11,269,254 · App. 15/743,199 · Granted Mar 8, 2022

Production method for antenna substrate, production method for antenna substrate with wiring line and electrode, and production method for RFID element

Inventors: Junji Wakita (Otsu, JP); Hiroji Shimizu (Otsu, JP); Seiichiro Murase (Otsu, JP)
Assignee: TORAY INDUSTRIES, INC.
G03F7/031G03F7/0035G03F7/0045G03F7/0047G03F7/0388G03F7/094G03F7/095G03F7/16G03F7/168G03F7/2002G03F7/2022G03F7/322G06K19/077G06K19/07722H01L21/4853H01L21/4867H01L23/66H01L29/786H01L51/05H01P11/00H01Q1/38H05K1/09H05K1/16B82Y30/00B82Y40/00G03F7/027H01L51/0036H01L51/0043H01L51/0048H01L2223/6677H01Q1/2208H01Q7/00Y10S977/742Y10S977/842Y10S977/954
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Quick Facts
Patent No.
US 11,269,254
App. No.
15/743,199
Granted
Mar 8, 2022
Kind
B2
Abstract

An object of the present invention is to provide a method for accurately forming an antenna substrate as well as an antenna substrate with wiring line and electrode by a coating method. One aspect of the present invention provides a method for producing an antenna substrate with wiring line and electrode including the steps of: (1) forming a coating film using a photosensitive paste containing a conductive material and a photosensitive organic component on an insulating substrate; (2-A) processing the coating film into a pattern corresponding to an antenna by photolithography; (2-B) processing the coating film into a pattern corresponding to a wiring line; (2-C) processing the coating film into a pattern corresponding to an electrode; (3-A) curing the pattern corresponding to an antenna into an antenna; (3-B) curing the pattern corresponding to a wiring line into a wiring line; and (3-C) curing the pattern corresponding to an electrode into an electrode.

Claims (56)

1. A method for producing an antenna substrate with a wiring line and electrode, comprising the steps of:

(1) forming a coating film using a photosensitive paste containing a conductive material and a photosensitive organic component on an insulating substrate;

(2-A) processing the coating film into a pattern corresponding to an antenna by photolithography;

(2-B) processing the coating film into a pattern corresponding to a wiring line by photolithography;

(2-C) processing the coating film into a pattern corresponding to an electrode by photolithography;

(3-A) curing the pattern corresponding to an antenna into an antenna;

(3-B) curing the pattern corresponding to a wiring line into a wiring line; and

(3-C) curing the pattern corresponding to an electrode into an electrode,

wherein steps (2-A), (2-B), and (2-C) are performed at the same time in a batch manner such that connections among the antenna, wiring line and electrode are continuous, and

wherein the electrode is operatively connected to a TFT or a capacitor.

2. The method for producing an antenna substrate with wiring line and electrode according to claim 1 , wherein the antenna has a thickness of 1 to 10 μm, and the wiring line and the electrode each have a thickness of 0.05 to 1.0 μm.

3. A method for producing an antenna substrate with wiring line and electrode, comprising the steps of:

(1-P) forming a coating film using a photosensitive paste containing a conductive material and a photosensitive organic component on an insulating substrate having an antenna thereon;

(2-P-B) processing the coating film into a pattern corresponding to a wiring line by photolithography;

(2-P-C) processing the coating film into a pattern corresponding to an electrode by photolithography;

(3-P-B) curing the pattern corresponding to a wiring line into a wiring line; and

(3-P-C) curing the pattern corresponding to an electrode into an electrode,

wherein steps (2-P-B) and (2-P-C) are performed at the same time in a batch manner such that a connection between the wiring line and electrode is continuous, and

wherein the electrode is operatively connected to a TFT or a capacitor.

4. The method for producing an antenna substrate with wiring line and electrode according to claim 3 , wherein in step (1-P), the coating film is formed so as to overlap a part of the antenna.

5. The method for producing an antenna substrate with wiring line and electrode according to claim 3 , wherein the insulating substrate having the antenna thereon is produced by a method including a step of bonding a conductive material to the insulating substrate.

6. The method for producing an antenna substrate with wiring line and electrode according to claim 1 , wherein the photosensitive organic component contains a compound having a urethane group.

7. The method for producing an antenna substrate with wiring line and electrode according to claim 1 , wherein the insulating substrate contains at least one resin selected from polyethylene terephthalate, polyethylene naphthalate, polyphenylene sulfide, polyphenylene sulfone, a cycloolefin polymer, a polyamide, and a polyimide.

8. A method for producing an RFID element, comprising the steps of:

(1) forming a coating film using a photosensitive paste containing a conductive material and a photosensitive organic component on an insulating substrate;

(2-A) processing the coating film into a pattern corresponding to an antenna by photolithography;

(2-B) processing the coating film into a pattern corresponding to a wiring line by photolithography;

(2-C) processing the coating film into a pattern corresponding to an electrode by photolithography;

(3-A) curing the pattern corresponding to an antenna into an antenna;

(3-B) curing the pattern corresponding to a wiring line into a wiring line;

(3-C) curing the pattern corresponding to an electrode into one or more electrodes to give an antenna substrate with wiring line and electrode; and

(4-S) forming a semiconductor layer on one or more of the electrodes or between the electrodes of the antenna substrate with wiring line and electrode,

wherein steps (2-A), (2-B), and (2-C) are performed at the same time in a batch manner such that connections among the antenna, wiring line and electrode are continuous, and

wherein the one or more electrodes are operatively connected to a TFT or a capacitor.

9. A method for producing an RFID element, comprising the steps of:

(1-P) forming a coating film using a photosensitive paste containing a conductive material and a photosensitive organic component on an insulating substrate having an antenna thereon;

(2-P-B) processing the coating film into a pattern corresponding to a wiring line by photolithography;

(2-P-C) processing the coating film into a pattern corresponding to an electrode by photolithography;

(3-P-B) curing the pattern corresponding to a wiring line into a wiring line;

(3-P-C) curing the pattern corresponding to an electrode into one or more electrodes to give an antenna substrate with wiring line and electrode; and

(4-S) forming a semiconductor layer on one or more of the electrodes or between the electrodes of the antenna substrate with wiring line and electrode,

wherein steps (2-P-B) and (2-P-C) are performed at the same time in a batch manner such that a connection between the wiring line and electrode is continuous, and

wherein the one or more electrodes are operatively connected to a TFT or a capacitor.

10. The method for producing an RFID element according to claim 8 , wherein step (4-S) includes a step of applying a solution containing carbon nanotubes.

11. The method for producing an antenna substrate with wiring line and electrode according to claim 1 , wherein

the insulating substrate comprises one or more resins including a polyimide, polyamide, polyester, epoxy, polyamideimide, polyetherimide, polyetherketone, polysulfone, polyphenylene sulfide (PPS) or cycloolefin resin; and

the photosensitive paste comprises a conductive powder and the photosensitive organic component which contains a monomer, oligomer or polymer having a polymerizable unsaturated group therein.

12. The method for producing an antenna substrate with wiring line and electrode according to claim 3 , wherein

the insulating substrate comprises one or more resins including a polyimide, polyamide, polyester, epoxy, polyamideimide, polyetherimide, polyetherketone, polysulfone, polyphenylene sulfide (PPS) or cycloolefin resin; and

the photosensitive paste comprises a conductive powder and the photosensitive organic component which contains a monomer, oligomer or polymer having a polymerizable unsaturated group therein.

13. The method for producing an antenna substrate with wiring line and electrode according to claim 8 , wherein

the insulating substrate comprises one or more resins including a polyimide, polyamide, polyester, epoxy, polyamideimide, polyetherimide, polyetherketone, polysulfone, polyphenylene sulfide (PPS) or cycloolefin resin; and

the photosensitive paste comprises a conductive powder and the photosensitive organic component which contains a monomer, oligomer or polymer having a polymerizable unsaturated group therein.

14. The method for producing an antenna substrate with wiring line and electrode according to claim 9 , wherein

the insulating substrate comprises one or more resins including a polyimide, polyamide, polyester, epoxy, polyamideimide, polyetherimide, polyetherketone, polysulfone, polyphenylene sulfide (PPS) or cycloolefin resin; and

the photosensitive paste comprises a conductive powder and the photosensitive organic component which contains a monomer, oligomer or polymer having a polymerizable unsaturated group therein.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2018
From: WAKITA, JUNJI; SHIMIZU, HIROJI; MURASE, SEIICHIRO
To: TORAY INDUSTRIES, INC.
Reel/Frame 044583/0687 →
Priority Claims (1)
JP JP2015-162813 · Aug 20, 2015 · national
Continuity (1)
Related Publication 20180210337A1 · Jul 26, 2018