Suppressing oxidation of silicon germanium selenium arsenide material
An ovonic threshold switch comprises a thin film composed essentially of Si, Ge, Se, As, and an amount of a chalcogen that is effective to passivate oxidation of the composition in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S. In one or more embodiments, the chalcogen is S. In one or more embodiments, the chalcogen is Te. In one or more embodiments, the effective amount of the chalcogen is greater than 1% by atomic percent. In one or more embodiments, the effective amount of the chalcogen is less than 10% by atomic percent. In one or more embodiments, the composition of matter comprises 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.
1. A composition of matter consisting essentially of:
Si, Ge, Se, As, and between 1 atomic percent and 10 atomic percent of a chalcogen that is effective to passivate oxidation of the composition in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S.
2. The composition of matter according to claim 1 , wherein the chalcogen is S.
3. The composition of matter according to claim 1 , wherein the chalcogen is Te.
4. The composition of matter according to claim 1 , consisting essentially of 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.
5. A cross point memory apparatus comprising:
a column wire;
a top electrode adjacent to and connected in electrical communication with the column wire;
an ovonic threshold switch (OTS) adjacent to and connected in electrical communication with the top electrode;
a middle electrode adjacent to and connected in electrical communication with the ovonic threshold switch (OTS);
a phase change memory (PCM) adjacent to and connected in electrical communication with the middle electrode;
a bottom electrode adjacent to and connected in electrical communication with the PCM; and
a row wire adjacent to and connected in electrical communication with the bottom electrode;
wherein the OTS comprises a thin film consisting essentially of Si, Ge, Se, As, and between 1 atomic percent and 10 atomic percent of a chalcogen that is effective to passivate oxidation of the thin film in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S.
6. The apparatus of claim 5 , wherein the chalcogen is S.
7. The apparatus of claim 5 , wherein the chalcogen is Te.
8. The apparatus of claim 5 , the thin film consisting essentially of 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.
9. A method comprising:
forming a bottom electrode;
forming a phase change memory (PCM) adjacent to and connected in electrical communication with the bottom electrode;
forming a middle electrode adjacent to and connected in electrical communication with the PCM;
forming an ovonic threshold switch (OTS) adjacent to and connected in electrical communication with the middle electrode; and
forming a top electrode adjacent to and connected in electrical communication with the OTS
wherein the OTS comprises a thin film consisting essentially of Si, Ge, Se, As, and between 1 atomic percent and 10 atomic percent of a chalcogen that is effective to passivate oxidation of the thin film in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S.
10. The method of claim 9 wherein the chalcogen is Te.
11. The method of claim 9 wherein the chalcogen is S.
12. The method of claim 9 wherein the thin film consists essentially of 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.