Capacitor and method for fabricating the same
A capacitor includes: a semiconductor substrate; a first insulating layer disposed under the substrate; a first trench group disposed in the substrate and the first insulating layer, the first trench group includes two first trenches which penetrate through the substrate downward from an upper surface of the substrate and enter the first insulating layer, and bottoms of the two first trenches are communicated to form a first cavity structure located in the first insulating layer; a laminated structure disposed above the substrate, in the first trench group, and in the first cavity structure, the laminated structure includes m insulating layers and n conductive layers forming a structure that each insulating layer electrically isolates each conductive layer from each other; a first electrode layer electrically connected to all odd-numbered conductive layers; and a second electrode layer electrically connected to all even-numbered conductive layers.
1. A capacitor, comprising:
a semiconductor substrate;
a first insulating layer disposed under the semiconductor substrate;
a first trench group disposed in the semiconductor substrate and the first insulating layer, wherein the first trench group comprises at least two first trenches which penetrate through the semiconductor substrate downward from an upper surface of the semiconductor substrate and enter the first insulating layer, and bottoms of the at least two first trenches are communicated to form a first cavity structure located in the first insulating layer;
a laminated structure disposed above the semiconductor substrate, in the first trench group, and in the first cavity structure, wherein the laminated structure comprises m insulating layers and n conductive layers, and the m insulating layers and the n conductive layers form a structure that a conductive layer and an insulating layer are adjacent to each other so that corresponding insulating layers in the m insulating layers electrically isolates the n conductive layers from each other, and m and n are positive integers;
a first electrode layer electrically connected to all odd-numbered conductive layers in the n conductive layers disposed in the first trench group; and
a second electrode layer electrically connected to all even-numbered conductive layers in the n conductive layers disposed in the first trench group.
2. The capacitor according to claim 1 , wherein the first electrode layer is electrically connected to all the odd-numbered conductive layers in the n conductive layers disposed in the first trench group through at least one first via structure.
3. The capacitor according to claim 1 , wherein the second electrode layer is electrically connected to all the even-numbered conductive layers in the n conductive layers disposed in the first trench group through at least one second via structure.
4. The capacitor according to claim 1 , wherein the first electrode layer is further electrically connected to the semiconductor substrate.
5. The capacitor according to claim 4 , wherein the first electrode layer is electrically connected to the semiconductor substrate through at least one third via structure.
6. The capacitor according to claim 1 , wherein the second electrode layer is further electrically connected to the semiconductor substrate.
7. The capacitor according to claim 6 , wherein the second electrode layer is electrically connected to the semiconductor substrate through at least one fourth via structure.
8. The capacitor according to claim 6 , wherein a corresponding insulating layer in the m insulating layers electrically isolates the n conductive layers from the semiconductor substrate.
9. The capacitor according to claim 1 , wherein part or all of the n conductive layers are disposed in the first cavity structure.
10. The capacitor according to claim 1 , wherein no insulating layer is provided under a conductive layer located at a bottom of the first trench group and a bottom of the first cavity structure.
11. The capacitor according to claim 1 , wherein the capacitor further comprises:
a first conductive layer disposed under the first insulating layer, wherein the first conductive layer comprises a first conductive region and a second conductive region separated from each other, the first conductive region forms the first electrode layer, and the second conductive region forms the second electrode layer.
12. The capacitor according to claim 11 , wherein the capacitor further comprises:
a base disposed between the first insulating layer and the first conductive layer, wherein the base forms a semiconductor on insulator (SOI) substrate with the semiconductor substrate and the first insulating layer; and
a second insulating layer disposed between the first conductive layer and the base to isolate the first conductive layer from the base.
13. The capacitor according to claim 1 , wherein
the first electrode layer is disposed under the first insulating layer, and
the second electrode layer is disposed above the laminated structure.
14. The capacitor according to claim 1 , further comprising a second trench group, a third electrode layer, and a fourth electrode layer,
wherein the second trench group is disposed in the semiconductor substrate and the first insulating layer and comprises at least two second trenches which penetrate through the semiconductor substrate downward from the upper surface of the semiconductor substrate and enter the first insulating layer, and bottoms of the at least two second trenches are communicated to form a second cavity structure located in the first insulating layer;
the laminated structure is further disposed in the second trench group and the second cavity structure, and there is no electrically connected conductive layer between the laminated structure disposed in the second trench group and the laminated structure disposed in the first trench group; and
the third electrode layer is electrically connected to all odd-numbered conductive layers in the n conductive layers disposed in the second trench group, and the fourth electrode is electrically connected to all even-numbered conductive layers in the n conductive layers disposed in the second trench group.
15. The capacitor according to claim 14 , wherein
the third electrode and the first electrode are a same electrode, and the fourth electrode and the second electrode are a same electrode; or
the third electrode and the first electrode are different electrodes, and the fourth electrode and the second electrode are a same electrode; or
the third electrode and the first electrode are a same electrode, and the fourth electrode and the second electrode are different electrodes; or
the third electrode and the first electrode are different electrodes, and the fourth electrode and the second electrode are different electrodes.
16. A method for fabricating a capacitor, comprising:
providing a semiconductor on insulator (SOI) substrate, wherein the SOI substrate comprises a semiconductor substrate, a first insulating layer and a base, and the first insulating layer is disposed between the semiconductor substrate and the base;
fabricating a first trench group on the SOI substrate, wherein the first trench group comprises at least two first trenches which penetrate through the semiconductor substrate downward from an upper surface of the semiconductor substrate and enter the first insulating layer, and bottoms of the at least two first trenches are communicated to form a first cavity structure located in the first insulating layer;
fabricating a laminated structure above the semiconductor substrate, in the first trench group and in the first cavity structure, wherein the laminated structure comprises m insulating layers and n conductive layers, and the m insulating layers and the n conductive layers form a structure that a conductive layer and an insulating layer are adjacent to each other, so that corresponding insulating layers in the m insulating layers electrically isolates the n conductive layers from each other, and m and n are positive integers; and
fabricating a first electrode layer and a second electrode layer, wherein the first electrode layer is electrically connected to all odd-numbered conductive layers in the n conductive layers located in the first trench group, and the second electrode layer is electrically connected to all even-numbered conductive layers in the n conductive layers located in the first trench group.
17. The method according to claim 16 , wherein the fabricating the first trench group on the SOI substrate comprises:
etching the SOI substrate to form the first trench group in the SOI substrate, and removing part of the first insulating layer exposed at the bottoms of the at least two first trenches to form the first cavity structure communicating with the bottoms of the at least two first trenches.
18. The method according to claim 16 , wherein the first cavity structure is formed between the first insulating layer and the semiconductor substrate in the SOI substrate; and
the fabricating the first trench group on the SOI substrate comprises:
etching the SOI substrate to form the first trench group in the SOI substrate, wherein the first cavity structure is communicated with the bottoms of the at least two first trenches.
19. The method according to claim 16 , wherein the method further comprises:
removing the base to expose the first insulating layer and an insulating layer located at a bottom of the first trench group and a bottom of the first cavity structure; and
removing the insulating layer located at the bottom of the first trench group and the bottom of the first cavity structure to expose a conductive layer located at the bottom of the first trench group and the bottom of the first cavity structure.
20. The method according to claim 19 , wherein the method further comprises:
depositing a first conductive layer under the first insulating layer;
wherein the fabricating the first electrode layer and the second electrode layer comprises:
etching the first conductive layer to form a first conductive region and a second conductive region separated from each other, wherein the first conductive region forms the first electrode layer and the second conductive region forms the second electrode layer.