Semiconductor device for logic and memory co-optimization
View Patent ↗Structures and methods for the co-optimization of core (logic) devices and SRAM devices include a semiconductor device having a logic portion and a memory portion. In some embodiments, a logic device is disposed within the logic portion. In some cases, the logic device includes a single fin N-type FinFET and a single fin P-type FinFET. In some examples, a static random-access memory (SRAM) device is disposed within the memory portion. The SRAM device includes an N-well region disposed between two P-well regions, where the two P-well regions include an N-type FinFET pass gate (PG) transistor and an N-type FinFET pull-down (PD) transistor, and where the N-well region includes a P-type FinFET pull-up (PU) transistor.
1. A semiconductor device, comprising:
a logic device including a single fin N-type FinFET and a single fin P-type FinFET; and
a static random-access memory (SRAM) device including an N-well region disposed between two P-well regions, wherein the two P-well regions include an N-type FinFET pull-down (PD) transistor, and wherein the N-well region includes a P-type FinFET pull-up (PU) transistor;
wherein a first gate formed over the single fin N-type FinFET has a first end-cap length ‘E 1 ’, and wherein a second gate formed over the N-type FinFET PD transistor has a second end-cap length ‘E 2 ’ greater than the first end-cap length ‘E 1 ’.
2. The semiconductor device of claim 1 , wherein the logic device is disposed within a logic portion of the semiconductor device, and wherein the SRAM device is disposed within a memory portion of the semiconductor device.
3. The semiconductor device of claim 1 , wherein the logic device has a first active region space ‘S 1 ’ between a channel region of the single fin N-type FinFET and a channel region of the single fin P-type FinFET, and wherein the SRAM device has a second active region space ‘S 2 ’ between a PD-channel region and a PU-channel region.
4. The semiconductor device of claim 3 , wherein the first active region space ‘S 1 ’ is larger than the second active region space ‘S 2 ’ by at least 20%.
5. The semiconductor device of claim 1 , wherein the second end-cap length ‘E 2 ’ is longer than the first end-cap length ‘E 1 ’ by at least 10%.
6. The semiconductor device of claim 1 , wherein an end-cap length ratio E 2 /E 1 is greater than 1.1.
7. The semiconductor device of claim 1 , wherein the logic device includes a first unit cell having a first X-pitch ‘X 1 ’, wherein the SRAM device includes a second unit cell having a second X-pitch ‘X 2 ’, and wherein the first X-pitch ‘X 1 ’ is the same as the second X-pitch ‘X 2 ’.
8. The semiconductor device of claim 1 , wherein the N-type FinFET PD transistor includes another single fin N-type FinFET, and wherein the P-type FinFET PU transistor includes another single fin P-type FinFET.
9. The semiconductor device of claim 1 , wherein the single fin N-type FinFET has a first fin width (W 1 ) in a first channel region, wherein the single fin P-type FinFET has a second fin width (W 2 ) in a second channel region, wherein the N-type FinFET PD transistor has a third fin width (W 3 ) in a third channel region, and wherein the P-type FinFET PU transistor has a fourth fin width (W 4 ) in a fourth channel region.
10. The semiconductor device of claim 9 , wherein the first fin width (W 1 ) is less than the third fin width (W 3 ) by at least 5%, and wherein the second fin width (W 2 ) is less than the fourth fin width (W 4 ) by at least by 5%.
11. The semiconductor device of claim 9 , wherein a first fin width ratio W 3 /W 1 is greater than 1.05, and wherein a second fin width ratio W 4 /W 2 is greater than 1.05.
12. The semiconductor device of claim 1 , wherein the logic device includes a first epitaxial source/drain region having a first source/drain epitaxial width, and wherein the SRAM device includes a second epitaxial source/drain region having a second source/drain epitaxial width greater than the first source/drain epitaxial width.
13. A circuit, comprising:
a logic circuit including a double fin FinFET device; and
a memory circuit including a plurality of single fin FinFET devices;
wherein the logic circuit includes a first unit cell having a first X-pitch ‘X 1 ’, and wherein the memory circuit includes a second unit cell having a second X-pitch ‘X 2 ’ equal to the first X-pitch ‘X 1 ’.
14. The circuit of claim 13 , wherein the memory circuit includes a plurality of static random-access memory (SRAM) unit cells arranged in a plurality of columns and rows.
15. The circuit of claim 14 , wherein each SRAM unit cell of the plurality of SRAM unit cells includes an N-well region disposed between two P-well regions, wherein the two P-well regions include an N-type FinFET pull-down (PD) transistor, and wherein the N-well region includes a P-type FinFET pull-up (PU) transistor.
16. The circuit of claim 13 , wherein the logic circuit has a first active region space ‘S 1 ’ between a channel region of a double fin N-type FinFET and a channel region of a double fin P-type FinFET, wherein an SRAM device of the memory circuit has a second active region space ‘S 2 ’ between a PD-channel region and a PU-channel region, and wherein the first active region space ‘S 1 ’ is greater than the second active region space ‘S 2 ’ by at least 20%.
17. The circuit of claim 13 , wherein a first gate formed over the double fin FinFET device has a first end-cap length ‘E 1 ’, wherein a second gate formed over an N-type FinFET PD transistor of the memory circuit has a second end-cap length ‘E 2 ’, and wherein the second end-cap length ‘E 2 ’ is greater than the first end-cap length ‘E 1 ’ by at least 10%.
18. The circuit of claim 15 , wherein the double fin FinFET device has a first fin width (W 1 ) in a first channel region, wherein the N-type FinFET PD transistor has a third fin width (W 3 ) in a third channel region, and wherein the first fin width (W 1 ) is less than the third fin width (W 3 ) by at least 10%.
19. A semiconductor device, comprising:
a plurality of CMOS logic devices, wherein each CMOS logic device includes a single fin N-type FinFET having a first fin width (W 1 ); and
a plurality of static random-access memory (SRAM) devices, wherein each SRAM device includes an N-type FinFET pull-down (PD) transistor disposed within a P-well region and a P-type FinFET pull-up (PU) transistor disposed within an N-well region, wherein the N-type FinFET PD transistor has a third fin width (W 3 ), and wherein the first fin width (W 1 ) is less than the third fin width (W 3 );
wherein a first gate formed over the single fin N-type FinFET has a first end-cap length ‘E 1 ’, and wherein the first end-cap length ‘E 1 ’ is at least two times greater than a thickness of a metal gate layer of the first gate.
20. The semiconductor device of claim 19 ,
wherein each CMOS logic device has a first active region space ‘S 1 ’ between a channel region of the single fin N-type FinFET and a channel region of a single fin P-type FinFET, wherein each SRAM device has a second active region space ‘S 2 ’ between a PD-channel region and a PU-channel region, wherein the first active region space ‘S 1 ’ is greater than the second active region space ‘S 2 ’ by at least 20%; and
wherein a second gate formed over the N-type FinFET PD transistor has a second end-cap length ‘E 2 ’, and wherein the second end-cap length ‘E 2 ’ is greater than the first end-cap length ‘E 1 ’ by at least 10%.