Appearance inspection apparatus and appearance inspection method
Accuracy of detecting abnormalities on the surface of a workpiece is improved. An appearance inspection apparatus for inspecting the appearance of a workpiece is provided. The appearance inspection apparatus for inspecting the appearance of the workpiece includes a first lighting unit that irradiates the workpiece with light, a first imaging unit that images the workpiece irradiated by the first lighting unit, a first detection unit that detects a first defect from an image captured by the first imaging unit, a second lighting unit that irradiates the workpiece with light, a second imaging unit that images the workpiece irradiated by the second lighting unit, and a second detection unit that detects a second defect from an image captured by the second imaging unit. The first lighting unit uses coaxial epi-illumination, and the second lighting unit uses coaxial epi-illumination and dome illumination.
1. An appearance inspection apparatus for inspecting appearance of a workpiece, the apparatus comprising:
a first lighting unit that irradiates the workpiece with light;
a first imaging unit that images the workpiece irradiated by the first lighting unit;
a first detection unit that detects a first defect from an image captured by the first imaging unit;
a second lighting unit that irradiates the workpiece with light;
a second imaging unit that images the workpiece irradiated by the second lighting unit; and
a second detection unit that detects a second defect from an image captured by the second imaging unit,
wherein
the first lighting unit uses coaxial epi-illumination, and
the second lighting unit uses coaxial epi-illumination and dome illumination.
2. The appearance inspection apparatus according to claim 1 , further comprising
a lifting unit that lifts or lowers the workpiece toward the second lighting unit,
wherein the lifting unit is provided below the second lighting unit in a vertical direction.
3. The appearance inspection apparatus according to claim 1 , wherein the first lighting unit and the second lighting unit use white light.
4. The appearance inspection apparatus according to claim 2 , wherein the first lighting unit and the second lighting unit use white light.
5. An appearance inspection method for inspecting appearance of a workpiece, the method comprising:
a first lighting step of irradiating the workpiece with light;
a first imaging step of imaging the workpiece that is irradiated in the first lighting step;
a first detection step of detecting a first defect from an image captured in the first imaging step;
a second lighting step of irradiating the workpiece with light;
a second imaging step of imaging the workpiece irradiated in the second lighting step;
a second detection step of detecting a second defect from an image captured in the second imaging step,
wherein
in the first lighting step, coaxial epi-illumination is used, and
in the second lighting step, coaxial epi-illumination and dome illumination are used.
6. The appearance inspection method according to claim 5 , wherein in the second lighting step, the workpiece is lifted or lowered in a vertical direction.
7. The appearance inspection method according to claim 5 , wherein in the first lighting step and the second lighting step, white light is used.
8. The appearance inspection method according to claim 6 , wherein in the first lighting step and the second lighting step, white light is used.