IP Library Granted Patent US 11,289,446
Granted Patent B2
US 11,289,446 · App. 15/937,972 · Granted Mar 29, 2022

Multiple actuator wire bonding apparatus

Inventors: Keng Yew Song (Singapore, SG); Yue Zhang (Singapore, SG); Xiao Liang Chen (Singapore, SG); Zheng Yu Lin (Singapore, SG)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
H01L24/78B23K20/007H01L2224/78823
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Quick Facts
Patent No.
US 11,289,446
App. No.
15/937,972
Granted
Mar 29, 2022
Kind
B2
Abstract

According to a first aspect of the present invention, there is provided a bond apparatus for bonding a wire to a bonding surface, comprising: a bond head body movably retained by a mounting portion; a first actuator; and a second actuator, wherein the bond head body has a tool portion configured to receive a bonding tool for receiving and bonding the wire and an actuator portion coupled with the first actuator and the second actuator, the first actuator and the second actuator being operative to act on the actuator portion for moving the bond head body with respect to the mounting portion to move the bonding tool with respect to the bonding surface.

Claims (23)

1. A bond head for bonding a wire to a bonding surface, comprising:

a bond head body movably retained by a mounting portion about a pivot having a pivot axis;

a first actuator comprising a first coil positioned between first and second magnet stacks, wherein at least one of the first and second magnet stacks comprises a plurality of magnets; and

a second actuator comprising a second coil positioned between the second magnet stack and a third magnet stack;

wherein said bond head body has

a tool portion configured to receive a bonding tool for receiving and bonding said wire and

an actuator portion coupled with said first actuator and said second actuator, said first actuator and said second actuator being operative to act on said actuator portion for driving said bond head body to rotate about the pivot axis with respect to said mounting portion to move said bonding tool in reciprocating directions toward and away from said bonding surface, the first and second coils being spaced from each other in a direction that is parallel to an axial direction of the pivot axis.

2. The bond head of claim 1 , wherein said first actuator is operative to generate a first force on said actuator portion and said second actuator is operative to generate a second force on said actuator portion.

3. The bond head of claim 2 , wherein said actuator portion is configured to receive said first force and said second force and be urged in a direction due to a resultant force comprising a combination of said first force and said second force.

4. The bond head of claim 2 , wherein said first actuator and said second actuator are operative to generate said first force and said second force with one of equal and unequal magnitudes.

5. The bond head of claim 2 , wherein said first actuator and said second actuator are operative to generate said first force and said second force to act in one of a common and differing directions.

6. The bond head of claim 2 , wherein at least one of said first actuator and said second actuator are operative to generate at least one of said first force and said second force with at least one of a time-varying magnitude and direction.

7. The bond head of claim 3 , wherein said actuation portion is configured to combine said first force and said second force to generate said resultant force having at least one of a time-varying magnitude and direction.

8. The bond head of claim 2 , wherein said first actuator and said second actuator are operative to generate said first force and said second force having equal magnitudes and acting in opposing directions to combine to produce a null resultant force.

9. The bond head of claim 1 , wherein said first actuator and said second actuator each comprises a motor.

10. The bond head of claim 1 , wherein said first actuator and said second actuator are collocated by said actuator portion.

11. The bond head of claim 1 , wherein said first actuator is spaced apart from but connected to said second actuator by said actuator portion.

12. The bond head of claim 1 , wherein said first actuator and said second actuator are both located for concurrent movement with said actuator portion.

13. The bond head of claim 1 , wherein said actuator portion has a first housing portion which receives said first coil of said first actuator and a second housing portion which receives said second coil of said second actuator.

14. The bond head of claim 13 , wherein said first coil of said first actuator is located in a fixed relationship with respect to said second coil of said second actuator by said actuator portion.

15. The bond head of claim 13 , wherein said actuator portion comprises at least one brace extended between said first housing portion and said second housing portion.

16. The bond head of claim 1 , wherein said first magnet stack of said first actuator is located in a fixed relationship with respect to said second magnet stack of said second actuator.

17. The bond head of claim 16 , wherein said first magnet stack and said second magnet stack are located in a fixed relationship with respect to said mounting portion.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2018
From: SONG, KENG YEW; ZHANG, YUE; CHEN, XIAO LIANG; LIN, ZHENG YU
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 045507/0341 →
Continuity (1)
Related Publication 20190304947A1 · Oct 3, 2019