P-type dipole for p-FET
Methods of forming and processing semiconductor devices are described. Certain embodiments related to electronic devices which comprise a dipole region having an interlayer dielectric, a high-κ dielectric material, and a dipole layer. The dipole layer comprises one or more of titanium aluminum nitride (TiAlN), titanium tantalum nitride (TiTaN), titanium oxide (TiO), tantalum oxide (TaO), and titanium aluminum carbide (TiAlC).
1. A method of manufacturing an electronic device, the method comprising:
depositing an interlayer dielectric on a top surface of a channel located between a source and a drain on a substrate;
depositing a high-κ dielectric material on the interlayer dielectric;
depositing a dipole layer on the high-κ dielectric material by exposing the substrate to alternating cycles of titanium nitride (TiN) and a dipole precursor at a temperature in a range of about 200° C. to about 500° C., the dipole precursor comprising one or more of titanium halide, triethylaluminum, tantalum halide, tantalum metal organic precursors, titanium metal organic precursors, aluminum nitride (AlN), and tantalum nitride (TaN); and
depositing a capping layer in situ, the capping layer comprising one or more of titanium nitride and titanium aluminum.
2. The method of claim 1 , wherein the dipole layer comprises one or more of titanium aluminum nitride (TiAlN), titanium tantalum nitride (TiTaN), titanium oxide (TiO), tantalum oxide (TaO), and titanium aluminum carbide (TiAlC).
3. The method of claim 1 , wherein the dipole layer has a thickness of less than about 50 Å.
4. The method of claim 1 , further comprising depositing a gate metal on a dipole region, wherein the dipole region comprises the interlayer dielectric, the high-κ dielectric material, and the dipole layer.
5. The method of claim 4 , wherein the gate metal comprises one or more of nitrogen (N), copper (Cu), cobalt (Co), tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel (Ni), ruthenium (Ru), silver (Ag), gold (Au), iridium (Jr), aluminum (Al), and platinum (Pt).
6. The method of claim 1 , wherein the source and the drain independently comprise one or more of copper (Cu), cobalt (Co), tungsten (W), titanium (Ti), molybdenum (Mo), nickel (Ni), ruthenium (Ru), silver (Ag), gold (Au), iridium (Jr), platinum (Pt), phosphorus (P), germanium (Ge), silicon (Si), aluminum (Al), and zirconium (Zr).
7. The method of claim 1 , wherein the interlayer dielectric comprises a low-κ dielectric.
8. The method of claim 7 , wherein the low-κ dielectric is selected from one or more of silicon, silicon oxide, doped silicon, doped silicon oxide, and spin-on dielectrics.
9. The method of claim 1 , wherein the high-κ dielectric material comprises one or more of hafnium oxide and lanthanum (La) doped high-κ dielectrics.
10. A non-transitory computer readable medium including instructions, that, when executed by a controller of a processing chamber, cause the processing chamber to perform the operations of:
deposit an interlayer dielectric on a top surface of a channel located between a source and a drain on a substrate;
deposit a high-κ dielectric material on the interlayer dielectric;
deposit a dipole layer on the high-κ dielectric material by exposing the substrate to alternating cycles of titanium nitride (TiN) and a dipole precursor at a temperature in a range of about 200° C. to about 500° C., the dipole precursor comprising one or more of titanium halide, triethylaluminum, tantalum halide, tantalum metal organic precursors, titanium metal organic precursors, aluminum nitride (AlN), and tantalum nitride (TaN); and
deposit a capping layer in situ, the capping layer comprising one or more of titanium nitride and titanium aluminum.