FinFET device and method of forming same

1. A method comprising:

forming a fin over a substrate;

forming a dummy gate structure over the fin;

removing a portion of the fin adjacent the dummy gate structure to form a first recess;

depositing a stressor material in the first recess, wherein the stressor material comprises a dielectric material;

removing a first portion of the stressor material using a first etching process, wherein a second portion of the stressor material remains on a bottom of the first recess after the first etching process;

after removing the first portion of the stressor material, removing the second portion of the stressor material using a second etching process, wherein the second etching process exposes a bottom of the first recess; and

after removing the second portion of the stressor material, epitaxially growing a source/drain region in the first recess.

2. The method of claim 1 , further comprising performing an anneal process on the stressor material.

3. The method of claim 1 , wherein depositing the stressor material in the first recess comprises:

depositing a first stressor material in the first recess;

after depositing the first stressor material, performing a first annealing process;

depositing a second stressor material over the first stressor material; and

after depositing the second stressor material, performing a second annealing process.

4. The method of claim 1 , further comprising:

forming a dielectric layer over the stressor material; and

forming an opening in the dielectric layer, wherein the source/drain region is epitaxially grown through the opening in the dielectric layer.

5. The method of claim 4 , further comprising forming a contact to the source/drain region through the opening in the dielectric layer.

6. The method of claim 5 , further comprising, after forming the contact, removing the dummy gate structure and forming a replacement gate structure over the fin.

7. The method of claim 1 , wherein the stressor material provides an amount of tensile stress on the fin between about 2.5 GPa and about 4.0 GPa.

8. The method of claim 1 , wherein after removing the first portion and prior to removing the second portion, forming a dielectric layer over the second portion of the stressor material.

9. A method comprising:

patterning a substrate to form a strip, the strip comprising a first semiconductor material;

forming an isolation region along a sidewall of the strip, an upper portion of the strip extending above a top surface of the isolation region;

forming a dummy gate structure along sidewalls and along a first top surface of the upper portion of the strip;

performing a first etching process on the strip to form a first recess in the strip adjacent to the dummy gate structure;

forming a first dielectric material within the first recess;

performing an anneal process on the first dielectric material, the first dielectric material providing a stress to the sidewalls of the first recess after the anneal process;

removing the first dielectric material from the first recess using multiple separate etch processes; and

epitaxially growing a source/drain region in the first recess.

10. The method of claim 9 , wherein the first dielectric material provides tensile stress.

11. The method of claim 9 , further comprising forming a second dielectric material over the first dielectric material and over the dummy gate structure.

12. The method of claim 9 , wherein the first dielectric material comprises SiN.

13. The method of claim 12 , wherein the first dielectric material is formed at a process temperature between about 300° C. and about 350° C.

14. The method of claim 9 , wherein the anneal process comprises a process temperature between about 800° C. and about 1000° C.

15. The method of claim 9 , further comprising forming an oxide layer within the first recess, wherein the first dielectric material is formed over the oxide layer.

16. The method of claim 9 , wherein a portion of the first dielectric material remains in the first recess after epitaxially growing a source/drain region in the first recess.

17. A method comprising:

forming a first dummy gate structure over a fin, the fin protruding from a substrate;

forming a first recess in the fin adjacent the first dummy gate structure;

depositing a dielectric stressor material in the first recess;

annealing the dielectric stressor material;

after annealing the dielectric stressor material, removing a first portion the dielectric stressor material;

forming a dielectric layer over remaining portions of the dielectric stressor material;

forming an opening in the dielectric layer, the opening exposing exposed portions of the remaining portions of the dielectric stressor material;

after forming the opening, removing the exposed portions of the remaining portions of the dielectric stressor material; and

after removing the dielectric stressor material, epitaxially growing a source/drain material in the first recess.

18. The method of claim 17 further comprising forming a buffer layer in the first recess prior to forming the dielectric stressor material.

19. The method of claim 17 further comprising:

forming a second dummy gate structure over the fin, wherein the first recess is interposed between the first dummy gate structure and the second dummy gate structure, wherein depositing the dielectric stressor material forms a void.

20. The method of claim 17 , wherein depositing the dielectric stressor material comprises depositing a plurality of layers.