Inclination measurement and correction of the cover glass in the optical path of a microscope

1. A method for adjusting a specimen holder in the beam path of a microscope, in which at least one beam of an illumination radiation is directed onto the specimen holder, comprising

capturing a component of the illumination radiation reflected by the specimen holder by means of a detector,

ascertaining measurement values of the captured illumination radiation,

establishing a current actual manner of positioning of the specimen holder in relation to the beam path depending on the measurement values,

comparing the established actual manner of positioning to an intended manner of positioning, and

producing control commands for modifying the actual manner of positioning, the execution of which causes the specimen holder to be moved into the intended manner of positioning,

wherein the illumination radiation is directed in the form of a light sheet onto the specimen holder, and

further comprising using a microscope embodied as an inverted microscope, having an illumination objective with a first optical axis, embodied to produce a light sheet by means of the illumination radiation, wherein the light sheet is produced or producible, at least in part, in a specimen plane that is spanned by an X-axis and a Y-axis orthogonal to the X-axis, and a detection objective with a second optical axis, embodied to detect light coming from the specimen plane, wherein the illumination objective and the detection objective are aligned relative to one another and relative to the specimen plane in such a way that the first optical axis and the second optical axis intersect in the specimen plane and include a substantially right angle therebetween, and the first optical axis and the second optical axis each include an angle that differs from zero with a third axis that is directed orthogonally to the specimen plane in the direction of a Z-axis and that serves as a reference axis,

wherein,

in a first step, the specimen holder, which has a base, transparent to the illumination radiation, with a first side face and second side face, is displaced in the direction of the Z-axis until the component of the illumination radiation reflected by the first side face of the base is captured and the relative position of the specimen holder and of the detector in relation to one another is modified in such a way that an actual relative position of the captured component approximates an intended relative position on the detector, and

in a second step, wherein

the presence of a tilt of the first side face of the base about the Y-axis is checked by virtue of establishing an angle deviation of the actual relative position from the intended relative position, and

an occurrence of a deviation of the intended position from the actual position in the direction of the Z-axis is checked and the first step is repeated if an inadmissible deviation occurs.

2. The method as claimed in claim 1 , wherein the illumination radiation is a radiation with self-reconstructing rays.

3. The method as claimed in claim 1 , wherein the illumination radiation is directed in the form of a Gaussian beam, a Bessel beam, coherent Bessel beam, a sectioned Bessel beam, a sinc 3 beam, a lattice light sheet, an Airy beam, or a Mathieu beam onto the specimen holder.

4. The method as claimed in claim 1 , wherein the light sheet is produced with illumination radiation of a wavelength that differs from the wavelength of an illumination radiation used for the imaging.

5. The method as claimed in claim 1 , in a third step, wherein an alignment of the first side face in the direction of the Y-axis is checked by virtue of the specimen holder being displaced in the direction of the Y-axis and a deviation from the direction of the Y-axis being determined by a migration of the captured reflected component on the detector, and

the specimen holder is rotated about the X-axis until migration no longer occurs, should migration occur.

6. The method as claimed in claim 1 , wherein,

in said second step the specimen holder is rotated about the Y-axis until the angle deviation is minimized should an angle deviation that is greater than an admissible angle deviation be determined, and

an occurrence of a deviation of the intended position from the actual position in the direction of the Z-axis is checked and the first step is repeated if an inadmissible deviation occurs.

7. The method as claimed in claim 6 , in a third step, wherein

an alignment of the first side face in the direction of the Y-axis is checked by virtue of the specimen holder being displaced in the direction of the Y-axis and a deviation from the direction of the Y-axis being determined by a migration of the captured reflected component on the detector, and

the specimen holder is rotated about the X-axis until migration no longer occurs, should migration occur.

8. The method as claimed in claim 6 , wherein in said first step the adjusted specimen holder is displaced in the direction of the Z-axis along a displacement path from an actual position, in which a component reflected from the first side face or from the second side face is captured by the detector in an intended relative position, until a reflected component of the respective other side face is captured in the intended relative position, and

a distance between a first and a second side face in the direction of the Z-axis is established depending on the traversed displacement path in the direction of the Z-axis.