Carrying device and fixing method of carrying device
View Patent ↗A carrying device and, a fixing method of a carrying device are provided. The carrying device includes a body and an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device. The present application uses the electromagnet fixing module to fix the carrying device, which can avoid downtime of an exposure machine caused by shaking of the carrying device when a robot arm of the exposure machine picks or places the mask form the carrying device so as to improve throughput.
1. A carrying device, comprising:
a body; and
an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device, the electromagnet fixing module comprises to first electromagnet fixing sub-module disposed on one side of the body and a second electromagnet fixing sub-module disposed on another side of the body, and the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module: and
wherein a first telescopic arm is disposed on one side of the body, a second telescopic arm is disposed on another side of the body, wherein the first telescopic arm is connected with the first electromagnet fixing sub-module, and the second telescopic arm is connected with the second electromagnet fixing sub-module.
2. The carrying device according to claim 1 , wherein a first accommodation groove is formed on one side of the body, a second accommodation groove is formed on another side of the body, wherein the first accommodation groove is configured to accommodate the first telescopic arm and the first electromagnet fixing, sub-module, and the second accommodation groove is configured to accommodate the second telescopic arm and the second electromagnet fixing sub-module.
3. The carrying device according to claim 2 , wherein a telescopic length of the first telescopic arm is greater than a depth of the first accommodation groove, and a telescopic length of the second telescopic arm is greater than a depth of the second accommodation groove.
4. The carrying device according to claim 1 , wherein the first electromagnet fixing sub-module is misaligned with the second electromagnet fixing sub-module.
5. The carrying device according to claim 1 , wherein the electromagnet fixing module is fixed on the body by means of a screw connection.
6. The carrying device according to claim 1 , wherein a power supply module is disposed on the body, the power supply module is configured to provide a voltage to the electromagnet fixing module, and to magnetize the electromagnet fixing module after power on.
7. A fixing method of a carrying device for use in the carrying device according to claim 1 , comprising:
detecting whether a trigger operation on a preset button is received; and
when the trigger operation on the preset button is received, powering on the electromagnet fixing module to magnetize the electromagnet fixing module to fix the carrying device.
8. A carrying device, comprising:
a body;
an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device, the electromagnet fixing module comprises a first electromagnet fixing sub-module disposed on one side of the body and a second electromagnet fixing sub-module disposed on another side of the body and the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module;
wherein a first telescopic arm is disposed on one side of the body, a second telescopic arm is disposed on another side of the body, wherein the first telescopic arm is connected with the first electromagnet fixing sub-module, and the second telescopic arm is connected with the second electromagnet fixing sub-module; and
a power supply module configured to provide a voltage to the electromagnet fixing module, and to magnetize the electromagnet fixing module after power on.
9. The carrying device according to claim 8 , wherein a first accommodate groove is formed on one side of the body, a second accommodation groove is formed on another side of the body, wherein the first accommodation groove is configured to accommodate the first telescopic arm and the first electromagnet fixing sub-module, and the second accommodation groove is configured to accommodate the second telescopic arm and the second electromagnet fixing sub-module.
10. The carrying device according to claim 9 , wherein a telescopic length of the first telescopic arm is greater than a depth of the first accommodation groove, and a telescopic length of the second telescopic arm is greater than a depth of the second accommodation groove.
11. The carrying device according to claim 8 , wherein the first electromagnet fixing sub-module is misaligned with the second electromagnet fixing sub-module.
12. The carrying device according to claim 8 , wherein the electromagnet fixing module is fixed on the body by means of a screw connection.