On-chip balun transformer
An on-chip balun transformer including a primary winding and a secondary winding is provided. The primary winding includes at least one parallel coil and a plurality of first serial semi-turn coils connected to the at least one parallel coil. The secondary winding, magnetically coupled to the primary winding, includes a plurality of second serial semi-turn coils connected to each other. At least one of the second serial semi-turn coils is located within the at least one parallel coil. The primary winding and the secondary winding are coplanar.
1. An on-chip balun transformer, comprising:
a primary winding, wherein the primary winding is an asymmetrical winding inductor and comprises at least one parallel-connected coil and a plurality of first serial semi-turn coils connected to the at least one parallel-connected coil through a plurality of first metal bridges;
a secondary winding magnetically coupled to the primary winding, wherein the secondary winding is a symmetrical winding inductor and comprises a plurality of second serial semi-turn coils connected to each other through a plurality of second metal bridges, wherein only a part of the second metal bridges is intersected with the first metal bridges;
wherein, at least one of the second serial semi-turn coils is located within the at least one parallel-connected coil;
the primary winding and the secondary winding are coplanar.
2. The on-chip balun transformer according to claim 1 , wherein, the at least one parallel-connected coil comprises a plurality of parallel-connected semi-turn coils each comprising a plurality of semi-turn coils and a first metal bridge group, the first metal bridge group connects terminals of the semi-turn coils and crosses over the second serial semi-turn coils of the secondary winding.
3. The on-chip balun transformer according to claim 1 , wherein, the at least one parallel-connected coil comprises at least one parallel-connected full-turn coil comprising a plurality of semi-turn coils and a second metal bridge group, the second metal bridge group connects terminals of the semi-turn coils and crosses over the second serial semi-turn coils of the secondary winding.
4. The on-chip balun transformer according to claim 2 , wherein, the on-chip balun transformer is formed in N metal layers (N is a positive integer) on a semiconductor substrate in a bottom-up manner,
the parallel-connected coil, the first serial semi-turn coils and the second serial semi-turn coils is formed on an N-th metal layer of the N metal layers;
the first metal bridge group is formed on an (N-1)-th metal layer of the N metal layers;
the on-chip balun transformer further comprises a third metal bridge group formed on a second metal layer to an (N-2)-th metal layer of the N metal layers.
5. The on-chip balun transformer according to claim 3 , wherein, the on-chip balun transformer is formed in N metal layers (N is a positive integer) on a semiconductor substrate in a bottom-up manner,
the parallel-connected coil, the first serial semi-turn coils and the second serial semi-turn coils are formed on an N-th metal layer of the N metal layers;
the second metal bridge group is formed on an (N-1)-th metal layer of the N metal layers;
the on-chip balun transformer further comprises a third metal bridge group formed on a second metal layer to an (N-2)-th metal layer of the N metal layers.