Nano-coating protection method for electrical devices
Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.
1. A reaction chamber for applying a multi-layer plasma chemical vapor deposition coating on an electrical device, the reaction chamber comprising:
a primary rotation rack configured to rotate the electrical device along a central axis via a primary rotation shaft;
a secondary rotation rack configured to secure the electrical device and rotate the electrical device along a planetary axis via a planetary rotation shaft coupled to the primary rotation rack;
a tail gas collecting tube positioned along the central axis;
a controller configured to transmit a control signal to cause a power source to apply a periodic electrical discharge to a metal grid located at an inner wall of the reaction chamber, wherein:
the periodic electrical discharge includes a plasma-on period when electrical discharge is applied to the metal grid to direct plasma into the reaction chamber to generate a reactive species and a first sublayer is formed on the electrical device; and
the periodic electrical discharge includes a plasma-off period when electrical discharge is not applied to the metal grid and a second sublayer is formed on the electrical device.
2. The reaction chamber of claim 1 , wherein the periodic electrical discharge is a discontinuous pulse discharge or periodic alternating discharge.
3. The reaction chamber of claim 1 , wherein the controller is configured to transmit a first rotation control signal to rotate, during the application of the first and second sublayer, the electrical device along the central axis of the reaction chamber via the primary rotation rack.
4. The reaction chamber of claim 3 , wherein the first rotation control signal controls the rotation rate of the primary rotation rack and the electrical device along the central axis.
5. The reaction chamber of claim 1 , wherein the controller is configured to transmit a second rotational control signal to rotate, during the application of the first and second sublayer, the electrical device along the planetary axis of the reaction chamber via the secondary rotation rack.
6. The reaction chamber of claim 5 , wherein the second rotation control signal controls the rotational rate of the secondary rotation rack and electrical device along the planetary axis.
7. The reaction chamber of claim 1 , further comprising:
a first monomer vapor pipe configured to discharge a first monomer vapor into the reaction chamber, the first monomer vapor releasing a first reactive species when energy from a first plasma is transferred to the first monomer vapor, and a second monomer vapor into the reaction chamber, the second monomer vapor releasing a second reactive species when energy from a second plasma is transferred to the second monomer vapor.
8. The reaction chamber of claim 1 , further comprising a porous electrode proximal to the inner wall of the reaction chamber and configured to generate plasma in the reaction chamber.