Structure variable type of a plasma source coil and a method for controlling the same
Provided is a structure variable type of a plasma source coil and a method for controlling the same. The plasma source coil comprises a plurality of coil branches extending in a spiral shape based on a central part, wherein at least one coil branch has a structure in which the extending direction or a tilting level can be adjusted.
1. A structure variable type of a plasma source coil comprising:
a plurality of coil branches extending in a spiral shape from a central part of the plasma source coil; and
an adjusting guide corresponding to each of the coil branch, the adjusting guide extending in a spiral shape and having a contact point at which an end part of a corresponding coil branch contacts,
wherein the contact point is configured to move along the adjusting guide, thereby an extending direction or a tilting level of the corresponding coil branch being able to be adjusted according to a position of the contact point.