Inline thin film processing device
A thin film processing device includes a showerhead for performing thin film processing for a substrate on a susceptor that moves along a transport track, and one or more transporters for supporting the susceptor. The transporters can transport the susceptor along the transport track while floating with respect to the track and not contacting the track, and can also control the height of the susceptor so as to adjust the distance from the substrate to the showerhead; and a transporter control system for controlling the transporters.
1. A thin film processing apparatus comprising: at least one tunnel-typed processing chamber which is disposed on a circular transport track comprising a predetermined straight line section and a curved section; one or more susceptors, each of which circularly moves along the transport track and comprises a stage on which a substrate to be processed is placed; a thin film processing showerhead which performs thin film processing for the substrate on the transport track and comprises at least one or more of a source gas supply module, a purge gas supply module, a reaction gas supply module, and a gas exhaust module; and one or more transporters, each of which supports the susceptor, transports the susceptor along the transport track while floating with respect to the track and not contacting the track, and controls a height of the susceptor to adjust the distance from the substrate to the showerhead, wherein the showerhead is provided with a plurality of nozzle heads, and comprises gas path switching valves each of which allows a gas of a gas reservoir to move toward the substrate when the susceptor enters under the showerhead and allows the gas of the gas reservoir to move to a bypass provided in a body of each of the nozzle heads when the susceptor is away from the showerhead.
2. The thin film processing apparatus of claim 1 , wherein the transporter has a structure of a magnetic levitation-type linear motor.
3. The thin film processing apparatus of claim 2 , wherein the transporter comprises a moving part provided on the susceptor and a static part provided on the track.
4. The thin film processing apparatus of claim 1 , wherein the transporters comprises a horizontal driving part and a vertical driving part to adjust a position of the susceptor in a horizontal direction and a vertical direction, respectively.
5. The thin film processing apparatus of claim 1 , wherein a position detection sensor is provided in the susceptor to detect a position of the susceptor inside the chamber.
6. The thin film processing apparatus of claim 1 , wherein a magnetic bumper is provided in the susceptor to prevent a collision with another susceptor using magnetic repulsion.
7. The thin film processing apparatus of claim 1 , wherein the transporter comprises a support part which supports the susceptor so that the susceptor is circularly transported.
8. The thin film processing apparatus of claim 7 , wherein the support part is provided with a slider assembly which allows the susceptor to reciprocate in one direction, and the slider assembly comprises a guide plate fixed below the susceptor and a sliding base to which the guide plate is slidably coupled.
9. The thin film processing apparatus of claim 1 , wherein a main gas passage, which allows the gas of the reservoir to move toward the substrate, and a gas path, which is connected to the main gas passage and allows the gas to move to the bypass, are provided inside the gas path switching valve.