Semiconductor structure and method of manufacturing the same
A semiconductor structure includes a substrate, a first word line structure, a second word line structure, a third word line structure, and a fourth word line structure. The substrate has an active region surrounded by an isolation structure. The first and second word line structures are disposed in the active region and separated from each other. The third and fourth word line structures are disposed in the isolation structure, and each of the third and the fourth word line structures includes a bottom work-function layer, a middle work-function layer on the bottom work-function layer, and a top work function layer on the work-function middle layer. The middle work-function layer has a work-function that is higher than a work-function of the top work-function layer and a work-function of the bottom work-function layer.
1. A semiconductor structure, comprising:
a substrate, wherein the substrate has an active region surrounded by an isolation structure;
a first word line structure and a second word line structure disposed in the active region and separated from each other; and
a third word line structure and a fourth word line structure disposed in the isolation structure, wherein each of the third word line structure and the fourth word line structure comprises:
a bottom work-function layer;
a middle work-function layer on the bottom work-function layer; and
a top work-function layer on the work-function middle layer, wherein the middle work-function layer has a work-function that is higher than a work-function of the top work-function layer and a work-function of the bottom work-function layer.
2. The semiconductor structure of claim 1 , further comprising first source/drain regions and a second source/drain region, wherein the second source/drain region is disposed between the first and the second word line structures, and the first and the second source/drain regions are disposed on opposite sides of each of the first word line structure and the second word line structure.
3. The semiconductor structure of claim 2 , further comprising capacitors electrically connected to the first source/drain regions, and a bit line contact electrically connected to the second source/drain region.
4. The semiconductor structure of claim 1 , wherein each of the first word line structure and the second word line structure comprises a lower portion and an upper portion, wherein the lower portion has a work-function that is higher than a work-function of the upper portion.
5. The semiconductor structure of claim 4 , wherein the lower portion of the first and the second word line structures are same as the middle work-function layer of the third and the fourth word line structures, and the upper portion of the first and the second word line structures are same as the top work-function layer of the third and the fourth word line structures.
6. The semiconductor structure of claim 1 , further comprising a dielectric layer between the first word line structure and an inner surface of the active region, and between the second word line structure and another inner surface of the active region.
7. The semiconductor structure of claim 1 , wherein a bottom of the third word line structure and the fourth word line structure is disposed below a bottom of the first word line structure and the second word line structure.
8. The semiconductor structure of claim 1 , wherein a bottom surface of the middle work-function layer and a bottom surface of each of the first and the second word line structures are at same horizontal level.
9. The semiconductor structure of claim 1 , wherein a top surface of the top work-function layer and a top surface of each of the first and the second word line structures are at same horizontal level.
10. The semiconductor structure of claim 1 , further comprising a capping layer disposed on the first, the second, the third, and the fourth word line structures.
11. The semiconductor structure of claim 10 , wherein the capping layer has a top surface that is level with a top surface of the isolation structure.