IP Library Granted Patent US 11,316,111
Granted Patent B2
US 11,316,111 · App. 16/701,024 · Granted Apr 26, 2022

Method for manufacturing display device using a mask frame

Inventor: Seil Kim (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
H01L51/0011C23C16/042C23C16/52H01L27/3244H01L51/001H01L51/56
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Quick Facts
Patent No.
US 11,316,111
App. No.
16/701,024
Granted
Apr 26, 2022
Kind
B2
Abstract

A mask assembly for manufacturing a display device, the mask assembly includes: a mask frame including a pair of first side portions arranged in a first direction, a pair of second side portions arranged in a second direction intersecting the first direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a support member attached to at least one of the first side portions and the second side portions of the mask frame with tensile force applied.

Claims (9)

1. A method of manufacturing a display device, the method comprising:

sensing deformation of a mask frame having a first central opening to receive a mask sheet and a second opening in an outer peripheral portion of the mask frame;

correcting the deformation of the mask frame by selectively attaching a support member to the second opening or removing a support member from the second opening depending upon the shape of the mask frame; and

arranging a mask assembly including the mask frame in which the deformation has been corrected inside a deposition chamber, and then supplying and depositing a deposition material on a display substrate of the display device by using a deposition source.

2. The method of claim 1 , wherein the step of attaching a support member comprises: arranging and fixing the support member on the mask frame by attaching the support member across the second opening with tensile force applied.

3. The method of claim 1 , wherein the support member comprises a plurality of first and second support sticks, and the method further comprises:

arranging the first support sticks and the second support sticks on portions of the mask frame depending on the deformation of the mask frame, the portions of the mask frame being different from each other with respect to a center of the mask frame.

4. The method of claim 3 , wherein the number of the first support sticks and the number of the second support sticks are different from each other.

5. The method of claim 1 , wherein the second opening comprises a groove and the support member crosses the groove in a width direction or lengthwise direction of the groove.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2019
From: KIM, SEIL
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 051154/0677 →
Priority Claims (1)
KR 10-2019-0013760 · Feb 1, 2019 · national
Continuity (1)
Related Publication 20200251656A1 · Aug 6, 2020
Cited By (2)
US 12,312,670 US 12,569,945