IP Library › Granted Patent US 11,326,258
Granted Patent B2
US 11,326,258 · App. 15/668,982 · Granted May 10, 2022

Deposition mask and method of manufacturing the same

Inventors: MyungJae Yoo (Paju-si, KR); HyunTaek Lim (Paju-si, KR); Huiseong Yu (Paju-si, KR); Joohwan Hwang (Paju-si, KR)
Assignee: LG DISPLAY CO., LTD.
C23C18/1633B23K26/244B23K26/28B23K26/32C23C18/161C23C18/1605C25D1/10H01L51/0004H01L51/0011
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,326,258
App. No.
15/668,982
Granted
May 10, 2022
Kind
B2
Abstract

The present disclosures provide a deposition mask and a method of manufacturing the same. The disclosed deposition mask may include: a deposition portion including a plurality of deposition patterns; and a boundary portion surrounding the deposition portion and including a first region and a second region extending from the first region. The boundary portion may have a thickness thicker than that of the deposition portion. Through this, it is possible to prevent a thermal deformation of the mask which may occur when the mask and mask frame are welded to each other.

Claims (21)

1. A mask for processing thin films, comprising:

a deposition portion having a plurality of deposition patterns; and

a boundary portion surrounding the deposition portion and having a first region, and a second region extending from the first region and separately formed from the first region;

a welding line provided to surround the deposition portion in the boundary portion; and

a mask frame attached to the boundary portion of the mask along the welding line,

wherein the boundary portion has a thickness greater than that of the deposition portion,

wherein the deposition patterns have a shape tapered towards an opposite surface of the deposition pattern from the mask frame, and the first region of the boundary portion has a shape tapered towards an opposite surface of the first region of the boundary portion from the mask frame, and

wherein the welding line comprises of four welding lines that respectively each run along a side of the deposition portion and are separated from one another in corners of the boundary portion, the separation of the four welding lines in the corners of the boundary portion being used when a glass substrate is disposed to cover areas corresponding to the corners of the boundary portion.

2. The mask of claim 1 , wherein the first region has a thickness equal to or greater than that of the deposition portion.

3. The mask of claim 1 , wherein the first region has a maximum width wider than that of the second region.

4. The mask of claim 1 , wherein the mask frame is attached to a first surface of the second region.

5. The mask of claim 4 , wherein the welding line is provided on a second surface of the first region.

6. The mask of claim 1 , wherein the welding line includes a solid line shape or a dotted line shape.

7. A mask for processing thin films, comprising:

a deposition portion having a plurality of deposition patterns;

a boundary portion surrounding the deposition portion and having first and second regions, wherein the second region extends from the first region and is separately formed from the first region, and the boundary portion has a thickness greater than that of the deposition portion;

a welding line provided to surround the deposition portion in the boundary portion; and

a mask frame attached to a first surface of the second region along the welding line,

wherein the deposition patterns have a shape tapered towards an opposite surface of the deposition pattern from the mask frame, and the first region of the boundary portion has a shape tapered towards an opposite surface of the first region of the boundary portion from the mask frame, and

wherein the welding line comprises of four welding lines that respectively each run along a side of the deposition portion and are separated from one another in corners of the boundary portion, the separation of the four welding lines in the corners of the boundary portion being used when a glass substrate is disposed to cover areas corresponding to the corners of the boundary portion.

8. The mask of claim 7 , wherein the welding line is on a second surface of the first region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 4, 2017
From: YOO, MYUNGJAE; LIM, HYUNTAEK; YU, HUISEONG; HWANG, JOOHWAN
To: LG DISPLAY CO., LTD.
Reel/Frame 043200/0061 →
Priority Claims (1)
KR 10-2016-0161160 · Nov 30, 2016 · national
Continuity (1)
Related Publication 20180148844A1 · May 31, 2018