MEMS actuation system
A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.
1. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator;
wherein the out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator, wherein the multi-morph piezoelectric actuator includes a moveable stage configured to be affixed to the in-plane MEMS actuator, a rigid frame assembly, a rigid intermediate stage, and at least one deformable piezoelectric portion configured to couple the moveable stage to the rigid frame assembly, wherein the at least one deformable piezoelectric portion includes:
a first deformable piezoelectric portion configured to couple the rigid intermediate stage to the moveable stage; and
a second deformable piezoelectric portion configured to couple the rigid intermediate stage to the rigid frame assembly.
2. The multi-axis MEMS assembly of claim 1 wherein:
the optoelectronic device is coupled to the in-plane MEMS actuator; and
the in-plane MEMS actuator is coupled to the out-of-plane MEMS actuator.
3. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is an image stabilization actuator.
4. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is configured to provide linear X-axis movement and linear Y-axis movement.
5. The multi-axis MEMS assembly of claim 4 wherein the in-plane MEMS actuator is further configured to provide rotational Z-axis movement.
6. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is an autofocus actuator.
7. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is configured to provide linear Z-axis movement.
8. The multi-axis MEMS assembly of claim 1 wherein the multi-morph piezoelectric actuator includes a bending piezoelectric actuator.
9. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator;
wherein:
the out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator, wherein the multi-morph piezoelectric actuator includes a moveable stage configured to be affixed to the in-plane MEMS actuator, a rigid frame assembly, a rigid intermediate stage, and at least one deformable piezoelectric portion configured to couple the moveable stage to the rigid frame assembly, wherein the at least one deformable piezoelectric portion includes:
a first deformable piezoelectric portion configured to couple the rigid intermediate stage to the moveable stage; and
a second deformable piezoelectric portion configured to couple the rigid intermediate stage to the rigid frame assembly,
the optoelectronic device is coupled to the in-plane MEMS actuator, and
the in-plane MEMS actuator is coupled to the out-of-plane MEMS actuator.
10. The multi-axis MEMS assembly of claim 9 wherein the in-plane MEMS actuator is an image stabilization actuator.
11. The multi-axis MEMS assembly of claim 9 wherein the out-of-plane MEMS actuator is an autofocus actuator.
12. The multi-axis MEMS assembly of claim 9 wherein the multi-morph piezoelectric actuator includes a bending piezoelectric actuator.
13. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator;
wherein at least one of the optoelectronic device is coupled to the in-plane MEMS actuator and the in-plane MEMS actuator is coupled to the out-of-plane MEMS actuator, and
an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator;
wherein the out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator, the multi-morph piezoelectric actuator including:
a moveable stage configured to be affixed to the in-plane MEMS actuator,
a rigid frame assembly,
a rigid intermediate stage, and
at least one deformable piezoelectric portion configured to couple the moveable stage to the rigid frame assembly, wherein the at least one deformable piezoelectric portion includes:
a first deformable piezoelectric portion configured to couple the rigid intermediate stage to the moveable stage; and
a second deformable piezoelectric portion configured to couple the rigid intermediate stage to the rigid frame assembly.