Solid-state imaging device and imaging device with combined dynamic vision sensor and imaging functions

1. A sensor, comprising:

a pixel array unit, wherein the pixel array unit includes:

a plurality of event detection pixels, the plurality of event detection pixels including a first pixel, the first pixel including:

a first photoelectric conversion region disposed in a substrate; and

an amplifier transistor coupled to the first photoelectric conversion region;

a plurality of image sensing pixels, the plurality of image sensing pixels including:

a second pixel including a second photoelectric conversion region disposed in the substrate;

a third pixel including a third photoelectric conversion region disposed in the substrate; and

an amplifier transistor coupled to the second and third photoelectric conversion regions;

a first isolation region disposed in the substrate between the first pixel and the second pixel; and

a second isolation region disposed in the substrate between the second pixel and the third pixel,

wherein the first isolation region extends deeper into the substrate than the second isolation region in a cross sectional view.

2. The sensor according to claim 1 , wherein the second pixel or the third pixel includes a floating diffusion that is overlapped with the second isolation region in plan view, and wherein the first pixel includes a floating diffusion that is not overlapped with the first isolation region in the plan view.

3. The sensor according to claim 1 , further comprising:

a plurality of image signal generation readout circuits, wherein for each photoelectric conversion region of each image sensing pixel an associated transfer transistor selectively couples the photoelectric conversion region to one of the image signal generation readout circuits.

4. The sensor according to claim 3 , wherein each image signal generation readout circuit is shared by multiple image sensing pixels.

5. The sensor according to claim 4 , further comprising:

a plurality of event detection readout circuits, wherein each photoelectric conversion region of each event detection pixel is coupled to one of the event detection readout circuits.

6. The sensor according to claim 5 , further comprising:

a plurality of second image signal generation readout circuits,

wherein each event detection pixel further includes a transfer transistor,

wherein for each photoelectric conversion region of each event detection pixel the associated transfer transistor selectively couples the photoelectric conversion region to one of the second event detection readout circuits.

7. The sensor according to claim 6 , wherein each second image signal generation readout circuit is shared by multiple event detection pixels.

8. The sensor according to claim 7 , wherein each event detection readout circuit is shared by multiple event detection pixels.

9. The sensor according to claim 8 , wherein the plurality of image sensing pixels includes a first number of image sensing pixels, wherein the plurality of event detection pixels includes a second number of event detection pixels, and wherein the first number is greater than the second number.

10. The sensor according to claim 9 , wherein an area of the photoelectric conversion region of each event detection pixel is greater than an area of the photoelectric conversion region of each image sensing pixel.

11. The sensor according to claim 9 , wherein the first number is at least three times greater than the second number.

12. The sensor according to claim 1 , wherein each event detection pixel responds to a change in light intensity asynchronously, wherein the plurality of image sensing pixels includes a first number of image sensing pixels, wherein the plurality of event detection pixels includes a second number of event detection pixels, and wherein the first number is greater than the second number.

13. The sensor according to claim 12 , wherein an area of each event detection pixel is greater than an area of each image sensing pixel.

14. The sensor according to claim 12 , wherein an area of the photoelectric conversion region of each event detection pixel is greater than an area of the photoelectric conversion region of each image sensing pixel.

15. The sensor according to claim 12 , wherein the first number is at least three times greater than the second number.

16. The sensor according to claim 1 , wherein each event detection pixel is surrounded by a full thickness trench isolation structure at a same depth in the substrate as the first isolation region.

17. The sensor according to claim 1 , wherein each image sensing pixel is separated from an adjacent image sensing pixel by a deep trench isolation structure at a same depth in the substrate as the second isolation region.

18. The sensor according to claim 17 , wherein each event detection pixel is separated from an adjacent event detection pixel by a deep trench isolation structure at a same depth in the substrate as the second isolation region.

19. The sensor according to claim 18 , wherein each event detection pixel is separated from an adjacent image sensing pixel by a full thickness trench isolation structure at a same depth in the substrate as the first isolation region.

20. An electronic apparatus, comprising:

an imaging lens; and

a solid-state imaging device, including:

at least one pixel array unit, wherein the pixel array unit includes:

a plurality of event detection pixels, the plurality of event detection pixels including:

a first photoelectric conversion region disposed in a substrate; and

an amplifier transistor;

a plurality of image sensing pixels, the plurality of image sensing pixels including:

a second photoelectric conversion region disposed in the substrate;

a third photoelectric conversion region disposed in the substrate; and

an amplifier transistor coupled to the second and third photoelectric conversion regions;

a first isolation region disposed in the substrate between the first photoelectric conversion region and the second photoelectric conversion region; and

a second isolation region disposed in the substrate between the second photoelectric conversion region and the third photoelectric conversion region,

wherein the first isolation region extends deeper into the substrate than the second isolation region in a cross sectional view; and

a control unit, wherein the control unit controls operation of the solid-state imaging device.

21. A method, comprising:

providing a pixel array unit, wherein the pixel array unit includes:

a plurality of event detection pixels, the plurality of event detection pixel including:

a first photoelectric conversion region disposed in a substrate; and

an amplifier transistor;

a plurality of image sensing pixels, the plurality of image sensing pixels including:

a second photoelectric conversion region disposed in the substrate;

a third photoelectric conversion region disposed in the substrate; and

an amplifier transistor coupled to the second and third photoelectric conversion regions;

a first isolation region disposed in the substrate between the first photoelectric conversion region and the second photoelectric conversion region; and

a second isolation region disposed in the substrate between the second photoelectric conversion region and the third photoelectric conversion region, wherein the first isolation region extends deeper into the substrate than the second isolation region in a cross sectional view.