Display device
A display device includes: a substrate including a display area and a peripheral area outside the display area; a plurality of display elements arranged in the display area; and a pad disposed in the peripheral area and having a multi-layered structure, where the multi-layered structure of the pad includes: a metal layer; a conductive protective layer on a top surface of the metal layer; and a metal thin film on a top surface of the conductive protective layer.
1. A display device comprising:
a substrate including a display area and a peripheral area outside the display area;
a plurality of display elements arranged in the display area;
a pad disposed in the peripheral area and having a multi-layered structure,
wherein the multi-layered structure of the pad comprises:
a metal layer;
a conductive protective layer on a top surface of the metal layer; and
a metal thin film on a top surface of the conductive protective layer; and
at least one insulating layer covering an edge of the multi-layered structure of the pad, wherein a hole is defined through the at least one insulating layer to overlap the multi-layered structure of the pad,
wherein the plurality of display elements is above the at least one insulating layer and the multi-layered structure of the pad is below the at least one insulating layer.
2. The display device of claim 1 , wherein
the conductive protective layer comprises a transparent conductive oxide.
3. The display device of claim 1 , wherein
a lateral surface of the multi-layered structure has a forward-tapered inclination.
4. The display device of claim 1 , wherein
Each of the metal layer and the metal thin film comprises at least one of Al, Pt, Pd, Ag, Mg, Au, Ni, Nd, Ir, Cr, Li, Ca, Mo, or Cu.
5. The display device of claim 1 , wherein
a thickness of the metal layer is greater than a thickness of the conductive protective layer, and
the thickness of the metal layer is greater than a thickness of the metal thin film.
6. The display device of claim 1 , wherein
a thickness of the metal thin film is about 300 Å or less.
7. The display device of claim 1 , wherein
the at least one insulating layer comprises:
an inorganic insulating layer, through which a first hole is defined to overlap the multi-layered structure of the pad; and
an organic insulating layer, through which a second hole is defined to overlap the multi-layered structure of the pad and the first hole.
8. The display device of claim 7 , wherein
a third hole is defined through the metal thin film of the multi-layered structure to overlap the hole of the at least one insulating layer.
9. The display device of claim 8 , wherein
the metal thin film comprises:
a metal sub-layer including a first metal element; and
a metal oxide sub-layer on a top surface of the metal sub-layer and including an oxide of the first metal element of the metal sub-layer.
10. The display device of claim 1 , wherein
the multi-layered structure of the pad further comprises:
a bottom metal layer on a bottom surface of the metal layer.
11. A display device comprising:
a substrate including a display area and a peripheral area outside the display area;
a plurality of display elements arranged in the display area;
a pad disposed in the peripheral area and having a multi-layered structure,
wherein the multi-layered structure of the pad comprises:
a metal layer;
a conductive protective layer on a top surface of the metal layer; and
a metal thin film on a top surface of the conductive protective layer, and
wherein the metal thin film comprises:
a metal sub-layer including a metal element; and
a metal oxide sub-layer on the metal sub-layer and including an oxide of the metal element of the metal sub-layer.
12. A display device comprising:
a substrate including a display area and a peripheral area outside the display area;
a display element in the display area;
a pixel circuit comprising a thin film transistor and a storage capacitor, wherein the thin film transistor and the storage capacitor are electrically connected to the display element;
a pad in the peripheral area and having a forward-tapered lateral surface,
wherein the pad has a multi-layered structure, and
the multi-layered structure of the pad comprises:
a conductive layer comprising a transparent conductive oxide; and
a metal thin film on a top surface of the conductive layer; and
at least one insulating layer covering an edge of the pad, wherein the display element is above the at least one insulating layer and the multi-layered structure of the pad is below the at least one insulating layer.
13. The display device of claim 12 , wherein
the metal thin film comprises at least one of Al, Pt, Pd, Ag, Mg, Au, Ni, Nd, Ir, Cr, Li, Ca, Mo, or Cu.
14. The display device of claim 12 , wherein
the metal thin film comprises:
a metal sub-layer including a metal element; and
a metal oxide sub-layer on a top surface of the metal sub-layer and including an oxide of the metal element of the metal sub-layer.
15. The display device of claim 12 ,
wherein a hole is defined through the at least one insulating layer to overlap the multi-layered structure of the pad.
16. The display device of claim 15 , wherein
a hole is defined through the metal thin film of the multi-layered structure to correspond to the hole of the at least one insulating layer.
17. The display device of claim 12 , wherein
at least one of an electrode of the thin film transistor or an electrode of the storage capacitor comprises a same number of sub-layers as the multi-layered structure of the pad.
18. The display device of claim 12 , wherein
the multi-layered structure of the pad comprises
a metal layer on a bottom surface of the conductive layer and having a thickness equal to or greater than about ½ a thickness of the pad.
19. The display device of claim 18 , further comprising:
a bottom conductive layer on a bottom surface of the conductive layer,
wherein the metal layer comprises at least one of Al, Pt, Pd, Ag, Mg, Au, Ni, Nd, Ir, Cr, Li, Ca, Mo, or Cu, and
the bottom conductive layer comprises a metal element different from a metal element of the metal layer.