Isolation schemes for gate-all-around transistor devices
Isolation schemes for gate-all-around (GAA) transistor devices are provided herein. In some cases, the isolation schemes include changing the semiconductor nanowires/nanoribbons in a targeted channel region between active or functional transistor devices to electrically isolate those active devices. The targeted channel region is referred to herein as a dummy channel region, as it is not used as an actual channel region for an active or functional transistor device. The semiconductor nanowires/nanoribbons in the dummy channel region can be changed by converting them to an electrical insulator and/or by adding dopant that is opposite in type relative to surrounding source/drain material (to create a p-n junction). The isolation schemes described herein enable neighboring active devices to retain strain in the nanowires/nanoribbons of their channel regions, thereby improving device performance.
1. An integrated circuit including at least one transistor, the integrated circuit comprising:
a first body including semiconductor material;
a gate structure wrapped around the first body, the gate structure including a gate electrode and a gate dielectric, the gate dielectric between the gate electrode and the first body, the gate electrode including one or more metals;
a source or drain region adjacent the body, the source or drain region including semiconductor material;
a second body adjacent the source or drain region, such that the source or drain region is between the first and second bodies, the second body including insulator material that includes oxygen and/or nitrogen; and
a structure wrapped around the second body, the structure separate and distinct from the second body.
2. The integrated circuit of claim 1 , wherein the first body is a nanowire or a nanoribbon, and the second body is a nanowire or a nanoribbon.
3. The integrated circuit of claim 1 , wherein the insulator material included in the second body includes oxygen.
4. The integrated circuit of claim 1 , wherein the structure includes one or more dielectrics.
5. The integrated circuit of claim 1 , wherein the structure includes a floating metal gate.
6. The integrated circuit of claim 1 , wherein the gate structure wraps around at least one additional body.
7. The integrated circuit of claim 1 , wherein the structure wraps around at least one additional body.
8. The integrated circuit of claim 1 , further comprising a substrate below each of the first body, the source or drain region, and the second body, the substrate including a layer of insulator material.
9. A computing system comprising the integrated circuit of claim 1 .
10. An integrated circuit including at least one transistor, the integrated circuit comprising:
a first body including semiconductor material;
a gate structure wrapped around the first body, the gate structure including a gate electrode and a gate dielectric, the gate dielectric between the gate electrode and the first body, the gate electrode including one or more metals;
a source or drain region adjacent the body, the source or drain region including semiconductor material and a first dopant, the first dopant being one of n-type or p-type;
a second body adjacent the source or drain region, such that the source or drain region is between the first and second bodies, the second body including semiconductor material and a second dopant, the second dopant being the other of n-type or p-type relative to the first dopant; and
a structure wrapped around the second body.
11. The integrated circuit of claim 10 , wherein the first body is a nanowire or a nanoribbon, and the second body is a nanowire or a nanoribbon.
12. The integrated circuit of claim 10 , wherein the second dopant has a concentration of at least 2E18 atoms per cubic centimeter.
13. The integrated circuit of claim 10 , wherein the structure includes one or more dielectrics.
14. The integrated circuit of claim 10 , wherein the structure includes a floating metal gate.
15. The integrated circuit of claim 10 , wherein the gate structure wraps around at least one additional body.
16. The integrated circuit of claim 10 , wherein the structure wraps around at least one additional body.
17. The integrated circuit of claim 10 , further comprising a substrate below each of the first body, the source or drain region, and the second body, the substrate including a layer of insulator material.
18. A computing system comprising the integrated circuit of claim 10 .
19. A method of forming an integrated circuit including at least one transistor, the method comprising:
forming a first body and a second body, the first and second bodies including semiconductor material;
forming a gate structure around the first body, the gate structure including a gate electrode and a gate dielectric, the gate dielectric between the gate electrode and the first body, the gate electrode including one or more metals;
forming a source or drain region between the first and second bodies, the source or drain region including semiconductor material and a first dopant, the first dopant being one of n-type or p-type;
adding, to the second body, one or more of oxygen, nitrogen, or a second dopant that is the other of n-type or p-type relative to the first dopant; and
forming a structure around the second body, the structure separate and distinct from the second body.
20. The method of claim 19 , wherein the first and second bodies are formed above a substrate, the substrate including a layer of insulator material.