Composite etch stop layers for sensor devices
A device and method for fabricating the same is disclosed. For example, the device includes a sensor having a front side and a back side, a metal interconnect layer formed on the front side of the sensor, an anti-reflective coating formed on the back side of the sensor, a composite etch stop mask layer formed on the anti-reflective coating wherein the composite etch stop mask layer includes a hydrogen rich layer and a compressive high density layer, and a light filter formed on the composite etch stop mask layer.
1. A method for fabricating a semiconductor image sensor device, comprising:
depositing a hydrogen rich layer of a composite etch stop layer on a dielectric layer of a portion of the semiconductor image sensor device that is formed;
depositing a compressive high density layer of the composite etch stop layer on the hydrogen rich layer;
depositing an oxide layer on the compressive high density layer;
depositing a silicon oxy-nitride layer on the oxide layer;
etching an oxide grid into the silicon oxy-nitride layer and the oxide layer; and
removing remaining portions of the silicon oxy-nitride layer on the oxide grid.
2. The method of claim 1 , wherein a thickness of the hydrogen rich layer and a thickness of the compressive high density layer are approximately equal.
3. The method of claim 1 , wherein the compressive high density layer comprises at least one of: silicon dioxide, silicon oxy-nitride, silicon carbide, undoped silicon glass (USG), high-stress undoped silicate glass (HSUSG), or a nitrogen free anti-reflection layer (NFARL).
4. A method for fabricating a semiconductor image sensor device, comprising:
depositing a hydrogen rich layer on a dielectric layer of a portion of the semiconductor image sensor device that is formed, wherein said portion of the semiconductor image sensor device that is formed comprises a metal interconnect layer, a sensor on the metal interconnect layer, and the dielectric layer on the sensor;
depositing an oxide layer on the hydrogen rich layer; and
etching away a portion of the oxide layer to form an oxide grid.
5. The method claim 4 , wherein etching away said portion of the oxide layer stops before reaching a top surface of the hydrogen rich layer.
6. The method claim 4 , further comprising depositing a compressive high density layer on the hydrogen rich layer before depositing the oxide layer.
7. The method claim 6 , wherein a stress of the compressive high density layer is more compressive than a stress of the hydrogen rich layer.
8. The method of claim 6 , wherein the compressive high density layer has a compressive stress between −500 megapascals to −1,000 megapascals.
9. The method of claim 6 , wherein an amount of silicon-hydrogen bonds in the hydrogen rich layer is greater than an amount of silicon-hydrogen bonds in the compressive high density layer.
10. The method of claim 4 , wherein the hydrogen rich layer has a tensile stress between 200 megapascals to 400 megapascals.
11. A method for fabricating a semiconductor image sensor device, comprising:
depositing a first etch stop layer on a sensor, wherein the sensor is on a metal interconnect layer;
depositing a second etch stop layer on the first etch stop layer, wherein an amount of hydrogen in the first etch stop layer is greater than an amount of hydrogen in the second etch stop layer;
depositing a material layer on the second etch stop layer; and
etching away a portion of the material layer to form a grid.
12. The method claim 11 , wherein etching away said portion of the material layer stops at the second etch stop layer.
13. The method of claim 11 , wherein the second etch stop layer has a compressive stress.
14. The method of claim 11 , wherein the first etch stop layer has a tensile stress.
15. The method of claim 11 , wherein the first etch stop layer comprises silicon-hydrogen bonds.
16. The method of claim 11 , wherein the first etch stop layer comprises between 12 atom percent to 30 atom percent silicon-hydrogen bonds.
17. The method of claim 11 , wherein depositing the first etch stop layer on the sensor is such that hydrogen atoms in the first etch stop layer is driven into the sensor.
18. The method of claim 11 , wherein depositing the first etch stop layer on the sensor is such that hydrogen atoms in the first etch stop layer is driven into the sensor to form silicon-hydrogen bonds.
19. The method of claim 11 , wherein depositing the material layer is such that the material layer is in contact with the second etch stop layer.
20. The method of claim 11 , wherein depositing the second etch stop layer is such that the second etch stop layer is in contact with the first etch stop layer.