Cutting method for forming chamfered corners
A cutting method for forming a chamfered corner includes a step of selecting a light pattern-adjusting module according to a pre-cut chamfer angle, a step of the light pattern-adjusting module emitting a laser beam to a substrate and thus forming a modified region extending in a thickness direction at the substrate, a step of the light pattern-adjusting module adjusting an axial energy distribution of a light pattern of the laser beam to vary an appearance of the modified region so as to form the modified region fulfilling the pre-cut chamfer angle, and a step of etching the substrate having the modified region to form a chamfered surface on the substrate by cutting the modified region from the substrate.
1. A cutting method for forming a chamfered corner, comprising the steps of:
(a) according to a pre-cut chamfer angle, selecting a light pattern-adjusting module from a plurality of light pattern-adjusting modules, wherein the light pattern-adjusting module specifies the pre-cut chamfer angle;
(b) the light pattern-adjusting module emitting a laser beam to a substrate, and thus forming a modified region extending in a thickness direction at the substrate;
(c) the light pattern-adjusting module adjusting an axial energy distribution of a light pattern of the laser beam to vary an appearance of the modified region, so as to form the modified region fulfilling the pre-cut chamfer angle; and
(d) etching the substrate having the modified region to form a chamfered surface on the substrate by cutting the modified region from the substrate;
wherein the laser beam has a focal position on the substrate, and the step (c) includes a step of adjusting the focal position of the laser beam having the axial energy distribution of the light pattern at the substrate;
wherein the step (b) includes a step of the laser beam having the axial energy distribution of the light pattern modifying the substrate.
2. The cutting method for forming a chamfered corner of claim 1 , wherein the step (a) includes a step of having a ratio of an FWHM of the axial energy distribution of the light pattern to a thickness of the substrate to be at least greater than 1.2.
3. The cutting method for forming a chamfered corner of claim 1 , wherein the axial energy distribution of the light pattern of the laser beam is a form of interference, diffraction or refraction.
4. The cutting method for forming a chamfered corner of claim 1 , wherein the light pattern-adjusting module is a lens set consisted of at least one conical lens, at least one spherical lens, at least one aspherical lens and at least one diffractive component.
5. The cutting method for forming a chamfered corner of claim 1 , wherein the laser beam emitted by the light pattern-adjusting module has a wavelength ranging from 0.3 μm to 11 μm.
6. The cutting method for forming a chamfered corner of claim 1 , wherein the laser beam emitted by the light pattern-adjusting module has an energy density ranging from 0.5 J/cm 2 to 80 J/cm 2 .
7. The cutting method for forming a chamfered corner of claim 1 , wherein the step (d) is performed by at least one wet etching or at least one dry etching.
8. The cutting method for forming a chamfered corner of claim 1 , wherein the step (a) includes the steps of:
(a1) placing the substrate on a cutting platform; and
(a2) inputting a pre-cut route, wherein the pre-cut route includes the pre-cut chamfer angle.