Apparatus for producing aqueous pH- and redox potential-adjusting solution
An apparatus has a platinum group metal carrying resin column provided in a supply line of ultrapure water, and has a pH adjuster injection device and a redox potential adjuster injection device provided in a later stage thereof. The apparatus has a membrane-type deaeration apparatus and a gas dissolving membrane apparatus sequentially provided in a later stage of the devices, and a discharge line communicates with the gas dissolving membrane apparatus. A pH meter and an ORP meter are each provided at some midpoint in the discharge line, and the pH meter and the ORP meter are connected to a control device. Then, the control device controls the amount of adjusters to be injected from the pH adjuster injection device and the redox potential adjuster injection device, on the basis of the measurement results of the pH meter and the ORP meter.
1. An apparatus for producing an aqueous pH- and redox potential-adjusting solution, comprising: a mechanism for removing hydrogen peroxide, a pH adjuster injection device for adding a pH adjuster into ultrapure water, and a redox potential adjuster injection device for adding a redox potential adjuster, which are sequentially provided in an ultrapure water supply line, and an adjusted solution is obtained by adding the pH adjuster and the redox potential adjuster into ultrapure water;
a membrane type deaeration apparatus for receiving the adjusted solution adjusted by the pH adjuster injection device and the redox potential adjuster injection device, wherein the membrane type deaeration apparatus includes a liquid phase chamber for passing the adjusted solution and a gaseous phase chamber for removing a gas dissolved in the adjusted solution composed by a hydrophobic gas permeable membrane;
pH measuring means and redox potential measuring means for measuring the adjusted solution deaerated by the membrane type deaeration apparatus; and
control means that controls an amount of the pH adjuster to be added by the pH adjuster injection device and an amount of the redox potential adjuster to be added by the redox potential adjuster injection device, on the basis of measured values of the pH measuring means and the redox potential measuring means,
wherein the redox potential adjuster is a hydrogen peroxide solution, and
wherein the aqueous pH- and redox potential-adjusting solution is obtained by passing ultrapure water through the mechanism for removing hydrogen peroxide, the pH adjuster injection device, the redox potential adjuster injection device, the pH measuring means and the redox potential measuring means.
2. The apparatus for producing the aqueous pH- and redox potential-adjusting solution according to claim 1 , wherein the pH adjuster is one or more selected from ammonia, sodium hydroxide, potassium hydroxide and TMAH.
3. The apparatus for producing the aqueous pH- and redox potential-adjusting solution according to claim 1 , comprising a gas dissolving membrane apparatus for receiving the adjusted solution deaerated by the membrane type deaeration apparatus.
4. The apparatus for producing the aqueous pH- and redox potential-adjusting solution according to claim 1 , wherein the produced aqueous pH- and redox potential-adjusting solution has a pH of 9 to 13 and a redox potential of 0 to 1.7 V.