Testing device
A testing device for inspecting an electronic device by causing contact terminals to electrically contact the electronic device, includes: a mounting table formed with a light transmission member opposite the side on which a inspection object is placed and having therein a coolant flow path through which a coolant capable of transmitting light flows; a light irradiation mechanism disposed so as to face the surface opposite the inspection object placement side of the mounting table, and having LEDs pointing toward the inspection object; and a controller controlling absorption of heat by the coolant and heating by the lights from the LEDs to control the temperature of the electronic device to be inspected. The controller controls the light output from the LEDs based on the measured temperature of the electronic device to be inspected and controls the absorption of heat by the coolant based on the LED light output.
1. A testing device that brings a contact terminal into electrical contact with an electronic device formed on an inspection object so as to inspect the electronic device, the testing device comprising:
a mounting table including a coolant flow path through which a coolant capable of transmitting light flows, a placement side of the inspection object formed by a lid member and a side which is opposite the placement side of the inspection object and formed by a light transmission member, the mounting table being configured to mount the inspection object on the placement side formed by the lid member;
a light irradiation mechanism having LEDs disposed to face a surface on the side opposite the placement side of the inspection object of the mounting table, the LEDs being directed toward the inspection object; and
a controller configured to control heat absorption by the coolant and heating by light from the LEDs so as to control a temperature of the electronic device to be inspected,
wherein the lid member and the light transmission member come into contact with each other, and
wherein the controller is configured to:
control a light output from the LEDs based on at least a measured temperature of the electronic device to be inspected; and
control the heat absorption by the coolant based on the light output of the LEDs.
2. The testing device of claim 1 , wherein the controller is configured to:
control the light output of the LEDs such that the temperature of the electronic device to be inspected becomes constant; and
control the heat absorption by the coolant such that the light output of the LEDs becomes constant.
3. The testing device of claim 2 , wherein the controller is configured to control, based on the measured temperature of the electronic device to be inspected and a measured temperature of the mounting table, the light output of the LEDs such that the temperature of the electronic device to be inspected becomes constant.
4. The testing device of claim 2 , wherein the controller is configured to control the heat absorption by the coolant such that the light output of the LEDs becomes constant by controlling a flow rate of the coolant.
5. The testing device of claim 3 , wherein the controller is configured to control the heat absorption by the coolant such that the light output of the LEDs becomes constant by controlling a flow rate of the coolant.
6. The testing device of claim 2 , wherein the controller is configured to control the heat absorption by the coolant by switching between execution and interruption of supply of the coolant based on whether the light output of the LEDs exceeds a predetermined value.
7. The testing device of claim 3 , wherein the controller is configured to control the heat absorption by the coolant by switching between execution and interruption of supply of the coolant based on whether the light output of the LEDs exceeds a predetermined value.
8. The testing device of claim 6 , wherein the controller causes the predetermined value to have a hysteresis.
9. The testing device of claim 7 , wherein the controller causes the predetermined value to have a hysteresis.