Production method of template, template blank, and template substrate for imprinting, production method of template for imprinting, and template
A template and a template blank are used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, in which a first step structure is formed on a main surface of a base, a second step structure is formed on the first step structure, and an outside region of the second step structure on an upper surface of the first step structure is covered with a light shielding film to solve the above problem.
1. A template to be used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, the template comprising:
a base with a main surface,
a first step structure on the main surface,
a second step structure on the first step structure, and
the transfer pattern at an upper surface of the second step structure; wherein
an outer side region of the second step structure at an upper surface of the first step structure is covered with a light shielding film,
a distance in a vertical direction from the main surface of the base to an upper surface of the light shielding film on the first step structure is H 1 ,
a distance in a vertical direction from the main surface of the base to an upper-most surface of the second step structure is H 3 ,
a distance in a horizontal direction from an outer edge of the main surface of the base to an outer edge of an upper surface of the first step structure is D 1 , and
a distance in a horizontal direction from the outer edge of the main surface of the base to an outer edge of the upper surface of the second step structure is D 2 , and
H 1 ≤H 3 ×(D 1 /D 2 ).
2. The template according to claim 1 , wherein
a distance in a vertical direction from the main surface of the base to an upper surface of the light shielding film on the first step structure is H 1 , and
a distance in a vertical direction from a main surface of the base to a bottom surface of a concave part in the transfer pattern at an upper surface of the second step structure is H 2 , and
H 1 <H 2 .
3. The template according to claim 1 further comprising a depression part at an opposite side surface to the main surface of the base, wherein the second step structure is interior to the depression part in a planar view.
4. The template according to claim 3 , wherein the first step structure is interior to the depression part in a planar view.
5. The template according to claim 1 , wherein a transmittance of the light shielding film with a wave length of 365 nm is 10% or less.
6. A template blank for producing a template to be used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, the template blank comprising:
a base with a main surface,
a first step structure on the main surface,
a second step structure on the first step structure; wherein
an outer side region of the second step structure at an upper surface of the first step structure is covered with a light shielding film,
a distance in a vertical direction from the main surface of the base to an upper surface of the light shielding film on the first step structure is H 1 ,
a distance in a vertical direction from the main surface of the base to an upper surface of the second step structure is H 4 ,
a distance in a horizontal direction from an outer edge of the main surface of the base to an outer edge of an upper surface of the first step structure is D 1 ,
a distance in a horizontal direction from the outer edge of the main surface of the base to an outer edge of the upper surface of the second step structure is D 2 , and
H 1 ≤H 4 ×(D 1 /D 2 ) is satisfied.
7. The template blank according to claim 6 , wherein
a distance in a vertical direction from the main surface of the base to an upper surface of the light shielding film on the first step structure is H 1 , and
a distance in a vertical direction from the main surface of the base to an upper surface of the second step structure is H 4 , and
H 1 <H 4 .
8. The template blank according to claim 6 , further comprising a depression part including the second step structure at an opposite side surface to the main surface of the base in a planar view.
9. The template blank according to claim 8 , wherein the depression part includes the first step structure in a planar view.
10. The template blank according to claim 6 , wherein a transmittance of the light shielding film with a wave length of 365 nm is 10% or less.