Overlay improvement in nanoimprint lithography
Reducing an overlay error in nanoimprint lithography includes forming an imprinted substrate having pairs of corresponding peripheral overlay marks and corresponding central overlay marks on the imprinted substrate. An in-plane overlay error is assessed based on relative positions of corresponding central overlay marks, and a combined overlay error is assessed based on relative positions of corresponding peripheral overlay marks. A difference between the combined overlay error and the in-plane overlay error is assessed to yield an adjusted overlay error for each pair of corresponding peripheral overlay marks. The adjusted overlay error for each pair of corresponding peripheral overlay marks is compared with overlay errors associated with known out-of-plane orientation parameters of the template with respect to the substrate, and corrected out-of-plane orientation parameters are selected to reduce an expected out-of-plane overlay error of a subsequent imprinted substrate associated with out-of-plane orientation parameters of the template with respect to the substrate.
1. An imprint lithography method, the method comprising:
detecting marks in a peripheral region of a substrate and a template or in a peripheral region of the substrate and an imprinted layer on the substrate, and marks in a central region of the substrate and the template or in a central region of the substrate and the imprinted layer,
wherein the peripheral region of the template is a region including a predetermined distance from a boundary of an imprinting portion of the template, and the central region of the template is a region inside the peripheral region of the template, and
wherein each of the peripheral region and the central region of the substrate and each of the peripheral region and the central region of the imprinted layer are corresponding to each of the peripheral region and the central region of the template;
performing a process to distinguish an in-plane component and an out-of-plane component based on a detection result of the marks in the peripheral region and a detection result of the marks in the central region; and
controlling a tilt of an imprint head or a force applied by the imprint head based on the distinguished out-of-plane component.
2. A method of manufacturing an article, the method comprising:
contacting the resist on a substrate with a template using the imprint lithography method according to the claim 1 ;
polymerizing the resist to yield a polymeric layer in contact with the template;
separating the template from the polymeric layer; and
forming an imprinted substrate to yield the article.