Laser processing apparatus with calculating section
A calculating section of a control unit calculates a vertical position Defocus for a condensing lens using a height value H 1 of a modified layer in a wafer that is set by a setting section according to the equation (1) below. Defocus=(thickness T 1 of wafer−height value H 1 −b )/ a ( 1 ) The calculating section calculates an appropriate vertical position for the condensing lens according to the equation (1) depending on the height value H 1 of the modified layer that is set by the setting section. Therefore, the vertical position of the condensing lens in laser processing operation can be determined more easily, and a time-consuming and tedious experiment for fine adjustment of the vertical position of the condensing lens does not need to be conducted.
1. A laser processing apparatus comprising:
a processing unit for positioning a focused point of a laser beam that is transmittable through a workpiece and that is focused by a condensing lens, within the workpiece to cause the focused point to form a modified layer within the workpiece;
a chuck table having a holding surface for holding the workpiece thereon;
a processing feed unit for processing-feeding the chuck table and the processing unit relatively to each other in a direction parallel to the holding surface;
lifting and lowering means for moving the condensing lens in a direction perpendicular to the holding surface; and
a control unit, wherein
the control unit includes
a setting section for setting a height value from a lower surface of the workpiece at a predetermined vertical position from the lower surface of the workpiece in order to form the modified layer at the predetermined vertical position within the workpiece, and
a calculating section for calculating a vertical position Defocus for the condensing lens according to the height value of the modified layer that is set by the setting section and the equation (1) below,
Defocus=(thickness of the workpiece−height value− b )/ a (1)
where “a” and “b” represent constants, and
the calculating section
positions the condensing lens at at least two points at different heights, forming at least two modified layers at different depths, while lowering the focused point of the condensing lens stepwise from an upper surface of the wafer,
plots spots corresponding to the at least two modified layers in a coordinate system having a vertical axis representing distance Depth from the modified layer to the upper surface of the workpiece and a horizontal axis representing vertical positions Defocus of the condensing lens,
determines the constant “a” as the slope and the constant “b” as the intercept of a linear function indicated by the equation (2) below that represents an approximate straight line passing through the spots corresponding to modified layers,
Depth= a ×Defocus+ b (2),
and
applies the equation (2) to the equation (3) below about the distances Depth from the modified layers to the upper surface of the workpiece, thereby obtaining the above equation (1),
Depth=thickness of the workpiece−height value (3),
and
the lifting and lowering means moves the condensing lens to the vertical position Defocus determined by the equation (1) to form a modified layer in the workpiece at the vertical position from the lower surface thereof that is set by the setting section.
2. The laser processing apparatus according to claim 1 , wherein
the calculating section changes the constants “a” and “b” to be used in the equation (1) depending on the distance Depth from the modified layer to the upper surface of the workpiece.