Thin film transistor, fabricating method thereof, and display apparatus
The present disclosure is related to a thin film transistor. The thin film transistor may include an active layer; a gate insulating layer on the active layer; and a gate and a plurality of metal films on the gate insulating layer. The plurality of metal films may be spaced apart from the gate, and insulated from the gate and the active layer.
1. A thin film transistor, comprising:
an active layer;
a gate insulating layer on the active layer; and
a gate and a plurality of metal films on the gate insulating layer;
wherein the plurality of metal films is spaced apart from the gate, and insulated from the gate and the active layer;
the plurality of metal films is spaced apart from one another, the gate is above a channel active area of the active layer, and the plurality of metal films is above conductive active areas of the active layer; and
an orthographic projection of the plurality of metal films on the active layer is within the conductive active areas of the active layer.
2. The thin film transistor of claim 1 , wherein an orthographic projection of the gate on the active layer is substantially the same as the channel active area of the active layer.
3. The thin film transistor of claim 1 , wherein the gate and the plurality of metal films are made of a same material.
4. The thin film transistor of claim 1 , wherein the gate and the plurality of metal films are formed by a same patterning process.
5. The thin film transistor of claim 1 , wherein each of the plurality of metal films has a substantially rectangular shape, and the plurality of metal films comprises two columns of metal films on both sides of the gate, respectively.
6. The thin film transistor of claim 1 , wherein each of the plurality of metal films comprises at least one of metals Cu, Al or Mo.
7. The thin film transistor of claim 1 , wherein each of the plurality of metal films has a thickness in a range of about 300 nm to about 1000 nm.
8. The thin film transistor of claim 1 , wherein each of the plurality of metal films has a surface area in a range of about 8 μm 2 to about 120 μm 2 .
9. The thin film transistor of claim 1 , further comprising a source and a drain, wherein the orthographic projection of the plurality of metal films on the active layer is between an orthographic projection of the source on the active layer and an orthographic projection of the drain on the active layer, and the plurality of metal films is insulated from the source and the drain.
10. A display apparatus, comprising the thin film transistor according to claim 1 .
11. A method of fabricating a thin film transistor, comprising:
forming an active layer, a gate insulating layer, and a first metal layer sequentially on a substrate; and
patterning the first metal layer to form a gate and a pluarity of metal films on at least one side of the gate,
wherein the plurality of metal films is insulated from the gate and the active layer;
patterning the first metal layer to form the gate and the pluarity of metal films on at least one side of the gate comprises:
placing a mask on the first metal layer, the mask having a pattern of the gate and the pluarity of metal films; and
removing the first metal layer and the gate insulating layer exposed by the mask through etching to form the gate and the pluarity of metal films on at lesat one side of the gate.
12. The method of fabricating a thin film transistor of claim 11 , wherein the first metal layer is formed on the gate insulating layer by a magnetron sputtering technique.
13. The method of fabricating a thin film transistor of claim 11 , wherein removing the first metal layer and the gate insulating layer exposed by the mask is performed through a dry etching method or a wet etching method.
14. The method of fabricating a thin film transistor of claim 11 , further comprising:
performing a conductorization process on the active layer using the gate and the plurality of metal films as a mask.
15. The method of fabricating a thin film transistor of claim 14 , wherein performing the conductorization process comprises conducting a plasma treatment on the active layer using the gate and the plurality of metal films as the mask, thereby forming a channel active area of the active layer underneath the gate and conductive active areas on both sides of the channel active area.
16. The method of fabricating a thin film transistor of claim 11 , further comprising:
forming an interlayer dielectric layer covering the active layer, the gate, and the plurality of metal films; and
forming a source and a drain on the interlayer dielectric layer,
wherein an orthographic projection of the plurality of metal films on the active layer is between an orthographic projection of the source on the active layer and an orthographic projection of the drain on the active layer, and
the plurality of metal films is insulated from the source and the drain.
17. The method of fabricating a thin film transistor of claim 16 , before forming the source and the drain on the interlayer dielectric layer, further comprising forming two via holes in the interlayer dielectric layer,
wherein the source and the drain are electrically connected to the active layer through the two via holes, respectively.