Electronic component handling device and electronic component testing apparatus

1. An electronic component handling apparatus for handling a DUT having a temperature detection circuit and pressing the DUT against a socket electrically connected to a tester testing the DUT, comprising:

a temperature adjuster adjusting a temperature of the DUT;

a first calculator calculating the temperature of the DUT on the basis of a detection result of the temperature detection circuit;

a temperature controller controlling the temperature adjuster; and

a first receiver receiving a first signal output from the tester,

wherein a temperature control performed by the temperature controller includes a first temperature control based on the temperature of the DUT calculated by the first calculator and a second temperature control different from the first temperature control,

wherein the temperature controller switches the temperature control of the DUT from the first temperature control to the second temperature control when the first receiver receives the first signal after the temperature controller starts the first temperature control,

wherein the first signal is input to the temperature controller after a first predetermined time is elapsed from the start of the first temperature control,

wherein the first predetermined time is set on the basis of a previously measured temperature profile,

wherein the temperature profile is a profile indicating a behavior of the temperature of the DUT tested by the tester while the temperature of the DUT is adjusted by the first temperature control, and

wherein the first predetermined time is set on the basis of an elapsed time from the start of the test to a temperature peak in the temperature profile and a heating amount at the temperature peak.

2. The electronic component handling device according to claim 1 ,

wherein the second temperature control includes controlling the temperature adjuster so that cooling or heating of the DUT is forcedly started on the basis of the first signal.

3. The electronic component handling apparatus according to claim 1 ,

wherein the first predetermined time is set on the basis of temperature control response characteristics of the temperature adjuster and temperature control response characteristics of the DUT in addition to the temperature profile.

4. The electronic component handling apparatus according to claim 1 ,

wherein the first signal is output from the tester to the first receiver on the basis of an external output trigger incorporated in a test program executed by the tester.

5. The electronic component handling apparatus according to claim 4 ,

wherein the test program includes a plurality of tests respectively having different test contents, and

wherein the external output trigger is incorporated into the test program so as to correspond to a specific test of the plurality of tests.

6. The electronic component handling apparatus according to claim 5 ,

wherein the external output trigger is incorporated immediately before the start of the specific test in the test program.

7. The electronic component handling apparatus according to claim 4 ,

wherein the specific test is a test having a temperature profile including a temperature peak, and

wherein the temperature profile is a previously measured profile and is a profile indicating a behavior of the DUT temperature tested by the tester while the temperature is adjusted by the first temperature control.

8. The electronic component handling apparatus according to claim 1 ,

wherein the temperature controller returns the DUT temperature control from the second temperature control to the first temperature control when the second temperature control is completed.

9. The electronic component handling apparatus according to claim 1 ,

wherein the second temperature control controls the temperature adjuster so that cooling or heating of the DUT is forcedly started on the basis of the first signal and the cooling or heating of the DUT is stopped after a second predetermined time is elapsed from the start of the second temperature control and the heating or cooling of the DUT is started.

10. The electronic component handling apparatus according to claim 1 ,

wherein the electronic component handling apparatus comprises a first controller outputting a start signal to the temperature controller, and

wherein the temperature controller starts the first temperature control when the start signal is input from the first controller.

11. The electronic component handling apparatus according to claim 1 , further comprising:

a second receiver receiving a second signal indicating a junction temperature of the DUT output from the tester; and

a third receiver receiving a third signal indicating the detection value of the temperature detection circuit output from the tester,

wherein the first calculator calculates the DUT temperature by using the second signal and the third signal.

12. An electronic component testing apparatus comprising:

the electronic component handling apparatus according to claim 1 ; and

the tester electrically connected to a socket, having a test program, and testing the DUT by executing the test program.

13. The electronic component testing apparatus according to claim 12 ,

wherein the tester includes:

a first transmitter transmitting the first signal;

a second calculator calculating the junction temperature of the DUT output from the detection value of the temperature detection circuit;

a second transmitter transmitting the calculation result of the second calculator as a second signal; and

a third transmitter transmitting the detection value of the temperature detection circuit as a third signal.